Low temperature magnetron sputter deposition of polycrystalline silicon thin films using high flux ion bombardment

2007 ◽  
Vol 101 (6) ◽  
pp. 063508 ◽  
Author(s):  
Jennifer E. Gerbi ◽  
John R. Abelson
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Polycrystalline Silicon ◽  
Ion Bombardment ◽  
Sputter Deposition ◽  
High Flux ◽  
Silicon Thin Films ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter

scholarly journals Macrocrystalline silicon thin films prepared by RF reactive magnetron sputter deposition

Vacuum ◽  
1995 ◽  
Vol 46 (12) ◽  
pp. 1385-1390 ◽  
Author(s):  
MF Cerqueira ◽  
M Andritschky ◽  
L Rebouta ◽  
JA Ferreira ◽  
MF da Silva
Keyword(s):  
Thin Films ◽  
Sputter Deposition ◽  
Reactive Magnetron ◽  
Silicon Thin Films ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter

scholarly journals Effect of Halogen on the Structure of Low Temperature Polycrystalline Silicon Thin Films Fabricated on Glass Substrates.

1999 ◽  
Vol 107 (1251) ◽  
pp. 1099-1104 ◽  
Author(s):  
Toshio KAMIYA ◽  
Yoshiteru MAEDA ◽  
Kouichi NAKAHATA ◽  
Takashi KOMARU ◽  
Charles M. FORTMANN ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Polycrystalline Silicon ◽  
Glass Substrates ◽  
Silicon Thin Films

Single‐target magnetron sputter deposition of high‐Tcsuperconducting Bi‐Sr‐Ca‐Cu‐O thin films

1988 ◽  
Vol 64 (10) ◽  
pp. 5259-5261 ◽  
Author(s):  
Neelkanth G. Dhere ◽  
John P. Goral ◽  
Alice R. Mason ◽  
Ramesh G. Dhere ◽  
Ronald H. Ono
Keyword(s):  
Thin Films ◽  
Sputter Deposition ◽  
Single Target ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter
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