Angle-dependent sputter yield of rippled surfaces

2018 ◽  
Vol 458 ◽  
pp. 18-23 ◽  
Author(s):  
V.I. Shulga
Keyword(s):  
Sputter Yield

Sputtering of silicon by atomic and cluster bismuth ions: An influence of projectile nuclearity and specific kinetic energy on the sputter yield

Vacuum ◽  
2021 ◽  
Vol 188 ◽  
pp. 110188
Author(s):  
A. Tolstogouzov ◽  
P. Mazarov ◽  
A.E. Ieshkin ◽  
S.F. Belykh ◽  
N.G. Korobeishchikov ◽  
...  
Keyword(s):  
Kinetic Energy ◽  
Specific Kinetic Energy ◽  
Sputter Yield

Inert gas ion pumping using differential sputter yield cathodes

Vacuum ◽  
1967 ◽  
Vol 17 (3) ◽  
pp. 163
Author(s):  
T. Tom ◽  
B.D. James
Keyword(s):  
Inert Gas ◽  
Sputter Yield ◽  
Ion Pumping

Effect of nanoconfinement on the sputter yield in ultrathin polymeric films: Experiments and model

2018 ◽  
Vol 444 ◽  
pp. 780-788 ◽  
Author(s):  
Vanina Cristaudo ◽  
Claude Poleunis ◽  
Arnaud Delcorte
Keyword(s):  
Polymeric Films ◽  
Sputter Yield

Influence of strain on sputter yield in nanowires

2020 ◽  
Vol 24 ◽  
pp. 101210
Author(s):  
J.C. Jiménez-Sáez ◽  
J.J. Jiménez-Rodríguez ◽  
S. Muñoz
Keyword(s):  
Sputter Yield

Impact of the Ge concentration on the Ge-ionisation probability and the matrix sputter yield for a SiGe matrix under oxygen irradiation

2004 ◽  
Vol 231-232 ◽  
pp. 708-712 ◽  
Author(s):  
C. Huyghebaert ◽  
T. Conard ◽  
B. Brijs ◽  
W. Vandervorst
Keyword(s):  
The Matrix ◽  
Sputter Yield
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