Surface, structural and optical properties of AlN thin films grown on different face sapphire substrates by metalorganic chemical vapor deposition
2018 ◽
Vol 458
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pp. 972-977
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2007 ◽
Vol 36
(6)
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pp. 654-658
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2008 ◽
1995 ◽
Vol 156
(3)
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pp. 227-234
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2004 ◽
Vol 266
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pp. 423-428
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Vol 5
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pp. 3014-3016
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