Surface, structural and optical properties of AlN thin films grown on different face sapphire substrates by metalorganic chemical vapor deposition

2018 ◽  
Vol 458 ◽  
pp. 972-977 ◽  
Author(s):  
Yao Li ◽  
Chi Zhang ◽  
Xuguang Luo ◽  
Yuanlan Liang ◽  
Dong-Sing Wuu ◽  
...  
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