Microstructure and optical properties of scandium oxide thin films prepared by metalorganic chemical-vapor deposition

Applied Physics Letters ◽

10.1063/1.1424072 ◽

2001 ◽

Vol 79 (23) ◽

pp. 3782-3784 ◽

Author(s):

Z. Xu ◽

A. Daga ◽

Haydn Chen

Keyword(s):

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Scandium Oxide ◽

Oxide Thin Films ◽

Metalorganic Chemical

Download Full-text

Microstructure and Optical Properties of Al[sub x]Ga[sub 1−x]N∕GaN Heterostructure Thin Films Grown on Si(111) Substrate by Plasma Assisted Metalorganic Chemical Vapor Deposition Method

10.1063/1.2906048 ◽

2008 ◽

Author(s):

H. Sutanto ◽

A. Subagio ◽

E. Supriyanto ◽

P. Arifin ◽

M. Budiman ◽

...

Keyword(s):

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Gan Heterostructure ◽

Metalorganic Chemical

Download Full-text

Plasma Metalorganic Chemical Vapor Deposition of Indium Oxide Thin Films

Japanese Journal of Applied Physics ◽

10.1143/jjap.28.l1096 ◽

1989 ◽

Vol 28 (Part 2, No. 7) ◽

pp. L1096-L1097 ◽

Author(s):

Toshiro Maruyama ◽

Toshio Kitamura

Keyword(s):

Chemical Vapor Deposition ◽

Indium Oxide ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Oxide Thin Films ◽

Metalorganic Chemical

Download Full-text

Characterization of Hafnium Oxide Thin Films by Source Gas Pulse Introduced Metalorganic Chemical Vapor Deposition Using Amino-Family Hf Precursors

Japanese Journal of Applied Physics ◽

10.1143/jjap.42.6015 ◽

2003 ◽

Vol 42 (Part 1, No. 9B) ◽

pp. 6015-6018 ◽

Author(s):

Shiro Hino ◽

Makoto Nakayama ◽

Kenji Takahashi ◽

Hiroshi Funakubo ◽

Eisuke Tokumitsu

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Hafnium Oxide ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Oxide Thin Films ◽

Metalorganic Chemical

Download Full-text

Growth of metal oxide thin films by laser‐induced metalorganic chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.363718 ◽

1996 ◽

Vol 80 (12) ◽

pp. 7073-7083 ◽

Author(s):

Koji Tokita ◽

Fumio Okada

Keyword(s):

Chemical Vapor Deposition ◽

Metal Oxide ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Oxide Thin Films ◽

Metal Oxide Thin Films ◽

Metalorganic Chemical

Download Full-text

Nonlinear optical properties of textured strontium barium niobate thin films prepared by metalorganic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.113347 ◽

1995 ◽

Vol 66 (14) ◽

pp. 1726-1728 ◽

Author(s):

M. J. Nystrom ◽

B. W. Wessels ◽

W. P. Lin ◽

G. K. Wong ◽

D. A. Neumayer ◽

...

Keyword(s):

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Nonlinear Optical ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Strontium Barium Niobate ◽

Strontium Barium ◽

Metalorganic Chemical

Download Full-text

Surface, structural and optical properties of AlN thin films grown on different face sapphire substrates by metalorganic chemical vapor deposition

Applied Surface Science ◽

10.1016/j.apsusc.2018.07.138 ◽

2018 ◽

Vol 458 ◽

pp. 972-977 ◽

Author(s):

Yao Li ◽

Chi Zhang ◽

Xuguang Luo ◽

Yuanlan Liang ◽

Dong-Sing Wuu ◽

...

Keyword(s):

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Structural And Optical Properties ◽

Sapphire Substrates ◽

Metalorganic Chemical

Download Full-text

Lanthanide Oxide Thin Films by Metalorganic Chemical Vapor Deposition Employing Volatile Guanidinate Precursors

Chemistry of Materials ◽

10.1021/cm902123m ◽

2009 ◽

Vol 21 (22) ◽

pp. 5443-5455 ◽

Author(s):

Andrian P. Milanov ◽

Teodor Toader ◽

Harish Parala ◽

Davide Barreca ◽

Alberto Gasparotto ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Oxide Thin Films ◽

Lanthanide Oxide ◽

Metalorganic Chemical

Download Full-text

Cobalt oxide thin films prepared by metalorganic chemical vapor deposition from cobalt acetylacetonate

Journal de Physique IV (Proceedings) ◽

10.1051/jp4:2001381 ◽

2001 ◽

Vol 11 (PR3) ◽

pp. Pr3-637-Pr3-643 ◽

Author(s):

A. U. Mane ◽

K. Shalini ◽

S. A. Shivashankar

Keyword(s):

Chemical Vapor Deposition ◽

Cobalt Oxide ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Oxide Thin Films ◽

Cobalt Acetylacetonate ◽

Metalorganic Chemical

Download Full-text

Low temperature growth of oxide thin films by metalorganic chemical vapor deposition

Integrated Ferroelectrics ◽

10.1080/10584589808238765 ◽

1998 ◽

Vol 20 (1-4) ◽

pp. 55-64 ◽

Author(s):

S. S. Yom

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Oxide Thin Films ◽

Temperature Growth ◽

Low Temperature Growth ◽

Metalorganic Chemical

Download Full-text

Plasma-assisted metalorganic chemical vapor deposition growth of ZnO thin films

Journal of Materials Research ◽

10.1557/jmr.2006.0221 ◽

2006 ◽

Vol 21 (7) ◽

pp. 1632-1637 ◽

Author(s):

Maria Losurdo ◽

Maria M. Giangregorio ◽

A. Sacchetti ◽

Pio Capezzuto ◽

Giovanni Bruno ◽

...

Keyword(s):

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Zno Thin Films ◽

Zno Films ◽

Chemical Vapor Deposition Growth ◽

Metalorganic Chemical

ZnO thin films have been grown by metalorganic chemical vapor deposition (MOCVD) and plasma-assisted (PA) MOCVD on c-axis-oriented sapphire (0001) and Si (001) substrates using the novel Zn(2-thenoyltrifluoroacetonate)2·N,N,N′,N′-tetramethylethylendiamine precursor. The structural, morphological, and optical properties of ZnO films have been investigated. The results show that the O2 PA growth results in highly c-axis-oriented hexagonal ZnO thin films also on cubic substrates. PA-MOCVD ZnO films have good optical properties, as inferred by the presence of a sharp and intense exciton in the dielectric function.

Download Full-text