Precise control over oxygen impurities in nano-crystalline silicon thin film processed with a low hydrogen dilution gas system at near room temperature

2014 ◽  
Vol 14 (6) ◽  
pp. 901-904 ◽  
Author(s):  
Jin Nyoung Jang ◽  
Dong Hyeok Lee ◽  
MunPyo Hong
Keyword(s):  
Thin Film ◽  
Room Temperature ◽  
Crystalline Silicon ◽  
Silicon Thin Film ◽  
Precise Control ◽  
Hydrogen Dilution ◽  
Nano Crystalline ◽  
Gas System ◽  
Oxygen Impurities

The effect of post-hydrogen annealing and multilayer channel structure on nano-crystalline silicon thin film transistor performance

2010 ◽  
Vol 43 (19) ◽  
pp. 195102 ◽  
Author(s):  
Cheng-I Lin ◽  
Yean-Kuen Fang ◽  
Feng-Renn Juang ◽  
Yen-Ting Chiang ◽  
Pao-Tung Chen ◽  
...  
Keyword(s):  
Thin Film ◽  
Crystalline Silicon ◽  
Thin Film Transistor ◽  
Channel Structure ◽  
Silicon Thin Film ◽  
Hydrogen Annealing ◽  
Nano Crystalline

Properties of nano-crystalline silicon thin film fabricated by electron beam exposure

2013 ◽  
Vol 63 (2) ◽  
pp. 20302 ◽  
Author(s):  
Eun Hye Lee ◽  
Su Woong Lee ◽  
Young Ju Eom ◽  
Hae Na Won ◽  
Jin Jang ◽  
...  
Keyword(s):  
Thin Film ◽  
Electron Beam ◽  
Crystalline Silicon ◽  
Silicon Thin Film ◽  
Nano Crystalline

Fabrication of nano-crystalline silicon thin film at low temperature by using a neutral beam deposition method

2010 ◽  
Vol 312 (14) ◽  
pp. 2145-2149 ◽  
Author(s):  
Se-Koo Kang ◽  
Min-Hwan Jeon ◽  
Jong-Yoon Park ◽  
Hyoung-Cheol Lee ◽  
Byung-Jae Park ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Crystalline Silicon ◽  
Neutral Beam ◽  
Deposition Method ◽  
Silicon Thin Film ◽  
Nano Crystalline ◽  
Beam Deposition

Supporting plasma processes for fabrication of n-doped nano-crystalline silicon thin film on low-cost glass substrates

Vacuum ◽  
2021 ◽  
pp. 110622
Author(s):  
Tung Thanh Bui ◽  
Tien Minh Huynh ◽  
Diep Ngoc LE ◽  
Phuoc Van Tran ◽  
Chien Mau Dang
Keyword(s):  
Thin Film ◽  
Crystalline Silicon ◽  
Low Cost ◽  
Silicon Thin Film ◽  
Glass Substrates ◽  
Nano Crystalline

Textured (111) crystalline silicon thin film growth on flexible glass by e-beam evaporation

2015 ◽  
Vol 158 ◽  
pp. 269-273 ◽  
Author(s):  
Shane McMahon ◽  
Ashok Chaudhari ◽  
Zhouying Zhao ◽  
Harry Efstathiadis
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Crystalline Silicon ◽  
Thin Film Growth ◽  
Silicon Thin Film
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