A low-temperature and short-annealing process for metal oxide thin film transistors using deep ultraviolet light for roll-to-roll processing

2019 ◽  
Vol 19 (8) ◽  
pp. 954-960 ◽  
Author(s):  
Daehwan Chae ◽  
Jaemin Kim ◽  
Jaehak Shin ◽  
Wi Hyoung Lee ◽  
Sunglim Ko
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Metal Oxide ◽  
Thin Film Transistors ◽  
Annealing Process ◽  
Oxide Thin Film ◽  
Roll To Roll ◽  
Metal Oxide Thin Film ◽  
Deep Ultraviolet ◽  
Short Annealing

Low-temperature, high-performance solution-processed metal oxide thin-film transistors formed by a ‘sol–gel on chip’ process

2010 ◽  
Vol 10 (1) ◽  
pp. 45-50 ◽  
Author(s):  
K. K. Banger ◽  
Y. Yamashita ◽  
K. Mori ◽  
R. L. Peterson ◽  
T. Leedham ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Metal Oxide ◽  
Thin Film Transistors ◽  
High Performance ◽  
Sol Gel ◽  
Oxide Thin Film ◽  
Solution Processed ◽  
Metal Oxide Thin Film ◽  
On Chip

Solution-processed indium-free ZnO/SnO2 bilayer heterostructures as a low-temperature route to high-performance metal oxide thin-film transistors with excellent stabilities

2016 ◽  
Vol 4 (47) ◽  
pp. 11298-11304 ◽  
Author(s):  
Sooji Nam ◽  
Jong-Heon Yang ◽  
Sung Haeng Cho ◽  
Ji Hun Choi ◽  
Oh-Sang Kwon ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Metal Oxide ◽  
Thin Film Transistors ◽  
High Performance ◽  
Oxide Thin Film ◽  
Solution Processed ◽  
Metal Oxide Thin Film

The ZnO/SnO2 bilayer TFTs exhibited outstanding electron mobilities and excellent electrical stabilities against a variety of bias stresses.

Low temperature fabrication of metal oxide thin film transistors formed by a heated aqueous precursor solution

2015 ◽  
Vol 55 (1) ◽  
pp. 010304 ◽  
Author(s):  
Keun Ho Lee ◽  
Sun Woong Han ◽  
Jee Ho Park ◽  
Young Bum Yoo ◽  
Se Jong Lee ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Metal Oxide ◽  
Thin Film Transistors ◽  
Precursor Solution ◽  
Oxide Thin Film ◽  
Metal Oxide Thin Film

Water-Mediated Photochemical Treatments for Low-Temperature Passivation of Metal-Oxide Thin-Film Transistors

2016 ◽  
Vol 8 (16) ◽  
pp. 10403-10412 ◽  
Author(s):  
Jae Sang Heo ◽  
Jeong-Wan Jo ◽  
Jingu Kang ◽  
Chan-Yong Jeong ◽  
Hu Young Jeong ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Metal Oxide ◽  
Thin Film Transistors ◽  
Oxide Thin Film ◽  
Metal Oxide Thin Film

Rapid low-temperature processing of metal-oxide thin film transistors with combined far ultraviolet and thermal annealing

2014 ◽  
Vol 105 (11) ◽  
pp. 113514 ◽  
Author(s):  
J. Leppäniemi ◽  
K. Ojanperä ◽  
T. Kololuoma ◽  
O.-H. Huttunen ◽  
J. Dahl ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Metal Oxide ◽  
Thermal Annealing ◽  
Thin Film Transistors ◽  
Oxide Thin Film ◽  
Low Temperature Processing ◽  
Metal Oxide Thin Film ◽  
Far Ultraviolet
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