Fracture behavior of diamond films deposited by DC arc plasma jet CVD

Interfaces between Mo substrate and free-standing diamond films prepared by DC arc plasma jet operated at gas recycling mode were investigated, including for the first time used and multi-time used substrate. The morphology, phase composition and bonding state of elements in the interface between substrates and diamond films were examined by optical microscopy, XRD and XPS. The profiles of carbon concentration of Mo substrates were measured by GDOES. It showed that Mo2C and MoC were formed on the first time used Mo substrate, and MoC was found on diamond films nucleation side after detachment. It suggested that MoC was peeled off from Mo substrate. The stable Mo2C on Mo substrate was formed after multi-time use of Mo substrate. However, MoC has not been found on it. The thickness of carburizing layer on the first time used Mo substrate is up to 30µm, and the carburizing layer on the multi-time used substrate is much thicker than that on the first used. The amorphous carbon in the surface of the substrate and nucleation side of diamond films was found by XPS, including for the first time used and multi-time used substrate.

Download Full-text

Free-standing diamond films deposited by DC arc plasma jet on graphite substrates with a destroyable Ti interlayer

Diamond and Related Materials ◽

10.1016/j.diamond.2009.08.001 ◽

2009 ◽

Vol 18 (11) ◽

pp. 1348-1352 ◽

Cited By ~ 14

Author(s):

Chengming Li ◽

Limei Wang ◽

Liangxian Chen ◽

Zheng Liu ◽

Lifu Hei ◽

...

Keyword(s):

Diamond Films ◽

Plasma Jet ◽

Arc Plasma ◽

Free Standing ◽

Dc Arc

Download Full-text

OES study of the gas phase during diamond films deposition in high power DC arc plasma jet CVD system

Chinese Physics ◽

10.1088/1009-1963/15/5/019 ◽

2006 ◽

Vol 15 (5) ◽

pp. 980-984 ◽

Cited By ~ 7

Author(s):

Zhou Zu-Yuan ◽

Chen Guang-Chao ◽

Tang Wei-Zhong ◽

Lü Fan-Xiu

Keyword(s):

Gas Phase ◽

High Power ◽

Diamond Films ◽

Plasma Jet ◽

Arc Plasma ◽

Dc Arc

Download Full-text

Application of optical emission spectra in controlling dominant crystalline surface of diamond films deposited by DC arc plasma jet CVD

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2006.07.214 ◽

2007 ◽

Vol 201 (9-11) ◽

pp. 4987-4990 ◽

Cited By ~ 10

Author(s):

Z.Y. Zhou ◽

G.C. Chen ◽

B. Li ◽

S.J. Askari ◽

W.Z. Tang ◽

...

Keyword(s):

Diamond Films ◽

Emission Spectra ◽

Optical Emission ◽

Plasma Jet ◽

Arc Plasma ◽

Crystalline Surface ◽

Dc Arc ◽

Optical Emission Spectra

Download Full-text

Growth feature of layered self-standing diamond films by DC arc plasma jet CVD

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2007.08.033 ◽

2007 ◽

Vol 309 (1) ◽

pp. 86-92 ◽

Cited By ~ 5

Author(s):

G.C. Chen ◽

H. Lan ◽

B. Li ◽

F.W. Dai ◽

S.J. Askari ◽

...

Keyword(s):

Diamond Films ◽

Plasma Jet ◽

Arc Plasma ◽

Growth Feature ◽

Dc Arc

Download Full-text

Diamond Films Synthesis with a DC Arc Plasma Jet: Effect of Substrate Temperature on Quality of Diamond Films

Solid State Phenomena ◽

10.4028/www.scientific.net/ssp.175.245 ◽

2011 ◽

Vol 175 ◽

pp. 245-248

Author(s):

Rong Fa Chen ◽

Liang Gang Dai ◽

Rui Zhu ◽

Xian Liang Zhang ◽

Tao Liu ◽

...

Keyword(s):

Substrate Temperature ◽

Diamond Film ◽

Diamond Films ◽

Plasma Jet ◽

Sem Analysis ◽

Arc Plasma ◽

X Ray Diffraction ◽

Dc Arc ◽

Substrate Temperatures

. High quality diamond film wafers with different thickness are prepared by high power DC arc plasma jet CVD (DCPJ CVD) method using a CH4/Ar/H2 gas mixture. The effect of substrate temperature on the quality of diamond film was studied with theoretical analysis and experimental investigation. The results indicate that different structures in diamond film may grow with different substrate temperatures. The temperatures of 800°C, 900°C and 1000°C were tested in the experiments. The quality of diamond film showed the best at the temperature of 900°C. Characterization by X-ray diffraction, Raman spectroscopy and SEM analysis are also carried out.

Download Full-text