A model-based methodology for the analysis and design of atomic layer deposition processes—Part I: Mechanistic modelling of continuous flow reactors
2012 ◽
Vol 81
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pp. 260-272
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2013 ◽
Vol 96
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pp. 71-86
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2013 ◽
Vol 94
◽
pp. 316-329
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Keyword(s):
2012 ◽
Vol 30
(1)
◽
pp. 01A115
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Keyword(s):
2020 ◽
Vol 38
(2)
◽
pp. 022602
Keyword(s):
2015 ◽
Vol 89
◽
pp. 468-481
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Keyword(s):
2010 ◽
Vol 28
(1)
◽
pp. 77-87
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2016 ◽
Vol 88
(9)
◽
pp. 1215-1216
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2020 ◽