Three dimensional characterisation of chromatography bead internal structure using X-ray computed tomography and focused ion beam microscopy

We have developed a new X-ray microscope which produces complete three dimensional images of samples. The microscope operates by performing X-ray tomography with unprecedented resolution. Tomography is a non-invasive imaging technique that creates maps of the internal structure of samples from measurement of the attenuation of penetrating radiation. As conventionally practiced in medical Computed Tomography (CT), radiologists produce maps of bone and tissue structure in several planar sections that reveal features with 1mm resolution and 1% contrast. Microtomography extends the capability of CT in several ways. First, the resolution which approaches one micron, is one thousand times higher than that of the medical CT. Second, our approach acquires and analyses the data in a panoramic imaging format that directly produces three-dimensional maps in a series of contiguous stacked planes. Typical maps available today consist of three hundred planar sections each containing 512x512 pixels. Finally, and perhaps of most import scientifically, microtomography using a synchrotron X-ray source, allows us to generate maps of individual element.

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3D Observation of Elemental Distribution of Si-Device using a Dedicated FIB/STEM System

ISTFA 2005: Conference Proceedings from the 31st International Symposium for Testing and Failure Analysis ◽

10.31399/asm.cp.istfa2005p0382 ◽

2005 ◽

Author(s):

T. Yaguchi ◽

M. Konno ◽

T. Kamino ◽

M. Ogasawara ◽

K. Kaji ◽

...

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Elemental Distribution ◽

Multivariate Statistical ◽

X Ray ◽

Sample Rotation ◽

Transmission Electron ◽

Scanning Transmission ◽

Elemental Maps

Abstract A technique for preparation of a pillar shaped sample and its multi-directional observation of the sample using a focused ion beam (FIB) / scanning transmission electron microscopy (STEM) system has been developed. The system employs an FIB/STEM compatible sample rotation holder with a specially designed rotation mechanism, which allows the sample to be rotated 360 degrees [1-3]. This technique was used for the three dimensional (3D) elemental mapping of a contact plug of a Si device in 90 nm technology. A specimen containing a contact plug was shaped to a pillar sample with a cross section of 200 nm x 200 nm and a 5 um length. Elemental analysis was performed with a 200 kV HD-2300 STEM equipped with the EDAX genesis Energy dispersive X-ray spectroscopy (EDX) system. Spectrum imaging combined with multivariate statistical analysis (MSA) [4, 5] was used to enhance the weak X-ray signals of the doped area, which contain a low concentration of As-K. The distributions of elements, especially the dopant As, were successfully enhanced by MSA. The elemental maps were .. reconstructed from the maps.

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Three‐dimensional X‐ray‐computed tomography of 3300‐ to 6000‐year‐old Citrullus seeds from Libya and Egypt compared to extant seeds throws doubts on species assignments

Plants People Planet ◽

10.1002/ppp3.10220 ◽

2021 ◽

Author(s):

Katherine A. Wolcott ◽

Guillaume Chomicki ◽

Yannick M. Staedler ◽

Krystyna Wasylikowa ◽

Mark Nesbitt ◽

...

Keyword(s):

Computed Tomography ◽

Three Dimensional ◽

X Ray ◽

X Ray Computed

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Cover Feature: Non‐Destructive Three‐Dimensional Imaging of Metal Organic Framework Mixed Matrix Membranes using Lab‐based X‐ray Computed Tomography (Chemistry ‐ Methods 5/2021)

Chemistry–Methods ◽

10.1002/cmtd.202100034 ◽

2021 ◽

Vol 1 (5) ◽

pp. 202-202

Author(s):

Anton Jansson ◽

Ignacio Luz ◽

Ching‐Chang Chung ◽

Mustapha Soukri

Keyword(s):

Computed Tomography ◽

Metal Organic Framework ◽

Three Dimensional ◽

Mixed Matrix Membranes ◽

Mixed Matrix ◽

Three Dimensional Imaging ◽

X Ray ◽

Metal Organic ◽

X Ray Computed ◽

Non Destructive

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Visualizing Fluid Flows With X-Rays

Volume 1: Symposia, Parts A and B ◽

10.1115/fedsm2007-37023 ◽

2007 ◽

Cited By ~ 4

Author(s):

Theodore J. Heindel ◽

Terrence C. Jensen ◽

Joseph N. Gray

Keyword(s):

Computed Tomography ◽

Flow Visualization ◽

Three Dimensional ◽

Fluid Flows ◽

X Rays ◽

Radiographic Images ◽

Optical Access ◽

X Ray ◽

X Ray Computed ◽

Density Map

There are several methods available to visualize fluid flows when one has optical access. However, when optical access is limited to near the boundaries or not available at all, alternative visualization methods are required. This paper will describe flow visualization using an X-ray system that is capable of digital X-ray radiography, digital X-ray stereography, and digital X-ray computed tomography (CT). The unique X-ray flow visualization facility will be briefly described, and then flow visualization of various systems will be shown. Radiographs provide a two-dimensional density map of a three dimensional process or object. Radiographic images of various multiphase flows will be presented. When two X-ray sources and detectors simultaneously acquire images of the same process or object from different orientations, stereographic imaging can be completed; this type of imaging will be demonstrated by trickling water through packed columns and by absorbing water in a porous medium. Finally, local time-averaged phase distributions can be determined from X-ray computed tomography (CT) imaging, and this will be shown by comparing CT images from two different gas-liquid sparged columns.

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