Effects of ethylene gas flow rate on optoelectrical properties of nitrogenated thin amorphous carbon films grown by microwave surface wave plasma CVD

2008 ◽  
Vol 17 (7-10) ◽  
pp. 1724-1727 ◽  
Author(s):  
Dilip C. Ghimire ◽  
S. Adhikari ◽  
H.R. Aryal ◽  
S.M. Mominuzzamn ◽  
T. Soga ◽  
...  
Keyword(s):  
Surface Wave ◽  
Amorphous Carbon ◽  
Flow Rate ◽  
Gas Flow ◽  
Carbon Films ◽  
Gas Flow Rate ◽  
Plasma Cvd ◽  
Amorphous Carbon Films

The role of pressure on thin amorphous carbon films deposited using microwave surface wave plasma CVD

2006 ◽  
Vol 15 (11-12) ◽  
pp. 1792-1794 ◽  
Author(s):  
Dilip Chandra Ghimire ◽  
Sudip Adhikari ◽  
Hideo Uchida ◽  
Masayoshi Umeno
Keyword(s):  
Surface Wave ◽  
Amorphous Carbon ◽  
Carbon Films ◽  
Plasma Cvd ◽  
Amorphous Carbon Films

scholarly journals Properties of Amorphous Carbon Films Synthesized by Atmospheric Pressure Glow Plasma CVD Method

2006 ◽  
Vol 19 (5) ◽  
pp. 673-678 ◽  
Author(s):  
Hideyuki Kodama ◽  
Satoshi Iizumi ◽  
Masayuki Nakaya ◽  
Akira Shirakura ◽  
Atsushi Morita ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Atmospheric Pressure ◽  
Carbon Films ◽  
Plasma Cvd ◽  
Amorphous Carbon Films ◽  
Cvd Method ◽  
Atmospheric Pressure Glow Plasma ◽  
Glow Plasma

scholarly journals Influences of acetylene gas flow rate on mechanical properties and chemical structure of nanocomposite TiC diamond-like carbon films

2007 ◽  
Vol 56 (4) ◽  
pp. 2377
Author(s):  
Ma Guo-Jia ◽  
Liu Xi-Liang ◽  
Zhang Hua-Fang ◽  
Wu Hong-Chen ◽  
Peng Li-Ping ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Flow Rate ◽  
Chemical Structure ◽  
Gas Flow ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Gas Flow Rate
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