Oxygen amount effect on optical properties of aluminium oxide nanostructured films prepared by reactive magnetron sputtering

Optik ◽

10.1016/j.ijleo.2016.02.007 ◽

2016 ◽

Vol 127 (11) ◽

pp. 4635-4638 ◽

Author(s):

E. Koushki ◽

S.H. Mousavi ◽

J. Baedi

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Aluminium Oxide ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Nanostructured Films ◽

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Structure and optical properties of Cd-substituted ZnO (Zn1−x Cd x O) thin films synthesized by the dc reactive magnetron sputtering

Applied Physics A ◽

10.1007/s00339-014-8451-y ◽

2014 ◽

Vol 117 (2) ◽

pp. 895-900 ◽

Author(s):

Jinghai Yang ◽

Yonggao Yue ◽

Yingrui Sui ◽

Yan Cao ◽

Maobin Wei ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering

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Depositing Aluminium Oxide: A Case Study of Reactive Magnetron Sputtering

Reactive Sputter Deposition - Springer Series in Materials Science ◽

10.1007/978-3-540-76664-3_5 ◽

2008 ◽

pp. 153-197 ◽

Author(s):

Diederik Depla ◽

Stijn Mahieu ◽

Roger De Gryse

Keyword(s):

Magnetron Sputtering ◽

Aluminium Oxide ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron

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Comparison of optical properties of TiO2 thin films prepared by reactive magnetron sputtering and electron-beam evaporation techniques

Semiconductor Physics Quantum Electronics & Optoelectronics ◽

10.15407/spqeo14.04.427 ◽

2011 ◽

Vol 14 (4) ◽

pp. 427-431 ◽

Author(s):

V. V. Brus ◽

◽

Keyword(s):

Optical Properties ◽

Electron Beam ◽

Magnetron Sputtering ◽

Electron Beam Evaporation ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Tio2 Thin Films

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Temperature dependence of the optical properties of mixed oxide thin films deposited by reactive magnetron sputtering

10.1117/12.625069 ◽

2005 ◽

Author(s):

M. Vergöhl ◽

B. Hunsche ◽

A. Ritz

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Temperature Dependence ◽

Mixed Oxide ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Oxide Thin Films

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Structural, electrical, and optical properties of F-doped SnO or SnO 2 films prepared by RF reactive magnetron sputtering at different substrate temperatures and O 2 fluxes

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2017.05.193 ◽

2017 ◽

Vol 719 ◽

pp. 429-437 ◽

Author(s):

B.L. Zhu ◽

X. Zhao ◽

W.C. Hu ◽

T.T. Li ◽

J. Wu ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Electrical And Optical Properties ◽

Substrate Temperatures

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The structural, electrical, and optical properties of SnO2 films prepared by reactive magnetron sputtering: Influence of substrate temperature and O2 flow rate

Materials Chemistry and Physics ◽

10.1016/j.matchemphys.2020.123129 ◽

2020 ◽

Vol 250 ◽

pp. 123129

Author(s):

Ye Tao ◽

Bailin Zhu ◽

Yuting Yang ◽

Jun Wu ◽

Xinwei Shi

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Substrate Temperature ◽

Flow Rate ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Electrical And Optical Properties ◽

Influence Of Substrate

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Electrical and optical properties of tantalum oxide thin films prepared by reactive magnetron sputtering

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2011.08.019 ◽

2011 ◽

Vol 509 (41) ◽

pp. 9758-9763 ◽

Author(s):

A.X. Wei ◽

Z.X. Ge ◽

X.H. Zhao ◽

J. Liu ◽

Y. Zhao

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Tantalum Oxide ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Oxide Thin Films ◽

Electrical And Optical Properties

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Effects of Rapid Thermal Processing on Microstructure and Optical Properties of As-Deposited Ag 2 O Films by Direct-Current Reactive Magnetron Sputtering

Chinese Physics Letters ◽

10.1088/0256-307x/27/2/026804 ◽

2010 ◽

Vol 27 (2) ◽

pp. 026804 ◽

Author(s):

Gao Xiao-Yong ◽

Feng Hong-Liang ◽

Zhang Zeng-Yuan ◽

Ma Jiao-Min ◽

Lu Jing-Xiao

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Direct Current ◽

Thermal Processing ◽

Rapid Thermal Processing ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron

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Study of electrical and optical properties of CNx thin films deposited by reactive magnetron sputtering

Microelectronics Reliability ◽

10.1016/j.microrel.2011.03.031 ◽

2011 ◽

Vol 51 (7) ◽

pp. 1207-1212 ◽

Author(s):

E.L. Prociów ◽

T. Chodzinski

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Electrical And Optical Properties

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Growth, nanostructure, and optical properties of epitaxial VNx/MgO(001) (0.80 ≤ x ≤ 1.00) layers deposited by reactive magnetron sputtering

Journal of Materials Chemistry C ◽

10.1039/c6tc02289h ◽

2016 ◽

Vol 4 (34) ◽

pp. 7924-7938 ◽

Author(s):

A. B. Mei ◽

M. Tuteja ◽

D. G. Sangiovanni ◽

R. T. Haasch ◽

A. Rockett ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron

VNx/MgO(001) layers (1.0 ≥x≥ 0.80) are characterized using structural-analyses, photoemission, ellipsometry, and theory; results show N-vacancies, the primary defects, are non-interacting.

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