Optical, structural evolution and surface morphology studies of hydrogenated silicon films synthesized by rf-magnetron sputtering: Effects of pressure and radio frequency power at low temperature
2016 ◽
Vol 37
(8)
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pp. 1326-1330
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Keyword(s):
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2011 ◽
Vol 46
(11)
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pp. 1975-1979
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Keyword(s):
2012 ◽
Vol 358
(4)
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pp. 854-859
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Keyword(s):
2016 ◽
Vol 100
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pp. 228-236
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Keyword(s):
1996 ◽
Vol 35
(Part 1, No. 5A)
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pp. 2548-2556
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