Mechanical behavior of TiN/CrN nano-multilayer thin film deposited by unbalanced magnetron sputter process

2011 ◽  
Vol 509 (6) ◽  
pp. 3197-3201 ◽  
Author(s):  
Pei-Ling Sun ◽  
Cherng-Yuh Su ◽  
Tai-Pin Liou ◽  
Cheng-Hsun Hsu ◽  
Chung-Kwei Lin
Keyword(s):  
Thin Film ◽  
Mechanical Behavior ◽  
Multilayer Thin Film ◽  
Unbalanced Magnetron ◽  
Magnetron Sputter

scholarly journals Selective normal mode excitation in multilayer thin film bulk acoustic wave resonators

2014 ◽  
Vol 105 (16) ◽  
pp. 162910 ◽  
Author(s):  
Andrey Kozyrev ◽  
Anatoly Mikhailov ◽  
Sergey Ptashnik ◽  
Peter K. Petrov ◽  
Neil Alford
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Normal Mode ◽  
Bulk Acoustic Wave ◽  
Multilayer Thin Film ◽  
Mode Excitation ◽  
Film Bulk ◽  
Acoustic Wave Resonators ◽  
Bulk Acoustic Wave Resonators
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