Effect of radio-frequency electric power applied to a boron nitride unbalanced magnetron sputter target on the deposition of cubic boron nitride thin film

Metals and Materials International ◽

10.1007/s12540-013-6028-5 ◽

2013 ◽

Vol 19 (6) ◽

pp. 1317-1321

Author(s):

Ji-Sun Ko ◽

Jong-Keuk Park ◽

Wook-Seong Lee ◽

Joo-Youl Huh ◽

Young-Joon Baik

Keyword(s):

Thin Film ◽

Boron Nitride ◽

Radio Frequency ◽

Electric Power ◽

Cubic Boron Nitride ◽

Unbalanced Magnetron ◽

Magnetron Sputter

Download Full-text

Insertion of nanocrystalline diamond film and the addition of hydrogen gas during deposition for adhesion improvement of cubic boron nitride thin film deposited by unbalanced magnetron sputtering method

Thin Solid Films ◽

10.1016/j.tsf.2013.02.058 ◽

2013 ◽

Vol 534 ◽

pp. 380-383 ◽

Author(s):

J.-S. Ko ◽

J.-K. Park ◽

W.-S. Lee ◽

J.-Y. Huh ◽

Y.-J. Baik

Keyword(s):

Thin Film ◽

Boron Nitride ◽

Magnetron Sputtering ◽

Diamond Film ◽

Cubic Boron Nitride ◽

Hydrogen Gas ◽

Nanocrystalline Diamond ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

Download Full-text

The parameter space of hydrogen content added to Ar–nitrogen sputtering gas and substrate bias voltage for the formation of cubic boron nitride thin film deposited by unbalanced magnetron sputtering method

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2013.02.032 ◽

2013 ◽

Vol 223 ◽

pp. 75-78 ◽

Author(s):

J.-S. Ko ◽

J.-K. Park ◽

W.-S. Lee ◽

Y.-J. Baik

Keyword(s):

Thin Film ◽

Boron Nitride ◽

Magnetron Sputtering ◽

Parameter Space ◽

Bias Voltage ◽

Cubic Boron Nitride ◽

Substrate Bias ◽

Substrate Bias Voltage ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

Download Full-text

Cubic boron nitride thin film deposition by unbalanced magnetron sputtering and dc pulsed substrate biasing

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581146 ◽

1998 ◽

Vol 16 (3) ◽

pp. 1331-1335 ◽

Author(s):

Wilfredo Otaño-Rivera ◽

Lawrence J. Pilione ◽

Juan A. Zapien ◽

Russell Messier

Keyword(s):

Thin Film ◽

Boron Nitride ◽

Magnetron Sputtering ◽

Cubic Boron Nitride ◽

Thin Film Deposition ◽

Film Deposition ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

Download Full-text

Effect of deposition temperature on cubic boron nitride thin film deposited by unbalanced magnetron sputtering method with a nanocrystalline diamond buffer layer

Metals and Materials International ◽

10.1007/s12540-013-6029-4 ◽

2013 ◽

Vol 19 (6) ◽

pp. 1323-1326 ◽

Author(s):

Eun-Sook Lee ◽

Jong-Keuk Park ◽

Wook-Seong Lee ◽

Tae-Yeon Seong ◽

Young-Joon Baik

Keyword(s):

Thin Film ◽

Boron Nitride ◽

Magnetron Sputtering ◽

Buffer Layer ◽

Deposition Temperature ◽

Cubic Boron Nitride ◽

Nanocrystalline Diamond ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

Download Full-text

Cubic boron nitride thin film synthesis on silica substrates by low-pressure inductively-coupled r.f. plasma chemical vapor deposition

Thin Solid Films ◽

10.1016/s0040-6090(99)00540-4 ◽

1999 ◽

Vol 354 (1-2) ◽

pp. 24-28 ◽

Author(s):

K.K. Chattopadhyay ◽

S. Matsumoto ◽

Y.-F. Zhang ◽

I. Sakaguchi ◽

M. Nishitani-Gamo ◽

...

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Boron Nitride ◽

Vapor Deposition ◽

Cubic Boron Nitride ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Inductively Coupled ◽

Download Full-text

Preparation of cubic boron nitride films by radio frequency sputtering

Acta Physica Sinica ◽

10.7498/aps.55.5441 ◽

2006 ◽

Vol 55 (10) ◽

pp. 5441

Author(s):

Tian Ling ◽

Ding Yi ◽

Chen Hao ◽

Liu Jun-Kai ◽

Deng Jin-Xiang ◽

...

Keyword(s):

Boron Nitride ◽

Radio Frequency ◽

Cubic Boron Nitride ◽

Radio Frequency Sputtering ◽

Boron Nitride Films

Download Full-text

Magnetron sputter deposition of low-stress, carbon-containing cubic boron nitride films using Ar―N2―CH4 gas mixtures

Thin Solid Films ◽

10.1016/j.tsf.2009.09.100 ◽

2009 ◽

Vol 518 (5) ◽

pp. 1455-1458 ◽

Author(s):

S. Ulrich ◽

J. Ye ◽

M. Stüber ◽

C. Ziebert

Keyword(s):

Boron Nitride ◽

Cubic Boron Nitride ◽

Gas Mixtures ◽

Sputter Deposition ◽

Magnetron Sputter Deposition ◽

Magnetron Sputter ◽

Boron Nitride Films

Download Full-text

Deposition of cubic boron nitride films by anode layer linear ion source assisted radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2018.03.005 ◽

2018 ◽

Vol 653 ◽

pp. 13-18 ◽

Author(s):

Shuai Tian ◽

Feng Xu ◽

Peng Ye ◽

Jinxin Wu ◽

Yousheng Zou ◽

...

Keyword(s):

Boron Nitride ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Cubic Boron Nitride ◽

Radio Frequency Magnetron ◽

Anode Layer ◽

Radio Frequency Magnetron Sputtering ◽

Boron Nitride Films

Download Full-text

Extension of the cubic boron nitride thin film growth phase diagram

Diamond and Related Materials ◽

10.1016/j.diamond.2011.12.024 ◽

2012 ◽

Vol 22 ◽

pp. 88-91 ◽

Author(s):

S. Weidner ◽

S. Geburt ◽

S. Milz ◽

J. Ye ◽

S. Ulrich ◽

...

Keyword(s):

Thin Film ◽

Phase Diagram ◽

Boron Nitride ◽

Growth Phase ◽

Film Growth ◽

Cubic Boron Nitride ◽

Thin Film Growth

Download Full-text

Embedding of Micro Thin Film Sensors Into Polycrystaline Cubic Boron Nitride (PCBN) for Potential Tooling Applications Via Diffusion Bonding

ASME 2008 International Manufacturing Science and Engineering Conference, Volume 2 ◽

10.1115/msec_icmp2008-72504 ◽

2008 ◽

Author(s):

Dirk Werschmoeller ◽

Xiaochun Li

Keyword(s):

Thin Film ◽

Boron Nitride ◽

Diffusion Bonding ◽

Cubic Boron Nitride ◽

Embedded Sensors ◽

Thin Film Sensors ◽

Increase Tool Life ◽

Microfabrication Techniques

Polycrystalline cubic boron nitride (PCBN) is increasingly being used in manufacturing processes to increase tool life and processing speed. Existing sensors in PCBN tools are unable to provide accurate time- and space-resolved measurements of the thermo-mechanical phenomena at and near the tool-work interface. Using microfabrication techniques along with diffusion bonding, thin film palladium-13wt% chromium (PdCr) alloy micro strain gage sensors were successfully embedded into PCBN structures for potential tooling applications. This article reports on the design, fabrication and characterization of a sensor consisting of three PdCr sensing elements embedded into a PCBN sample. The embedded sensors show good linearity and sensitivity.

Download Full-text