ITO monolayer and ITO/Ag/ITO multilayer thin films are prepared by D.C. magnetron
sputtering method, optical and electrical properties were estimated with different crystalline
properties and microstructures. The coated Ag layer thickness was around 50 , and the surface of
ITO/Ag/ITO thin film had the very fine island morphology. The growth of columnar phase was
inhibited, and most of phases were amorphous. The carrier concentration increased above 10 times
because of the effect of Ag layer, and the observed sheet resistance gave much lower value of below
4 / compared to that of coated crystalline ITO thin film that was 10 / , and the transmittance
was 80%.