The microstructures and mechanical properties of the high temperature titanium alloys containing Er, i.e. Ti-6Al-2.5Sn-4Zr-0.3Mo-1Nb-0.35Si-xEr (x=0, 0.1, 0.3wt%), were investigated. Both the grain size and lamellar structure inside grains were significantly refined with the addition of Er in as-cast alloys. Lamellar and duplex microstructures were obtained after forging and heat treatment. Silicide precipitates were generated in the boundary of lamellar α phase after aging treatment. Meanwhile, a few α2 phase were precipitated in the alloys after aging treatment. After 600°C /100h thermal exposure, the α2 phases with a mean size of 7nm and spacing of 10 nm were precipitated homogeneously in α lamellar. The creep properties were significantly improved by the addition of rare earth Er due to the formation of the second phase containing Er, silicide and α2 phase.