Zinc oxide (ZnO) coatings have various unique properties and are often used in applications such as transparent conductive films in photovoltaic systems. This study developed an atmospheric-pressure microplasma-enhanced ultrasonic spray pyrolysis system, which can prepare large-area ZnO coatings at low temperatures under atmospheric-pressure conditions. The addition of an atmospheric-pressure microplasma-assisted process helped improve the preparation of ZnO coatings under atmospheric conditions, compared to using a conventional ultrasonic spray pyrolysis process, effectively reducing the preparation temperature to 350 °C. A program-controlled three-axis platform demonstrated its potential for the large-scale synthesis of ZnO coatings. The X-ray diffraction results showed that the ZnO coatings prepared by ultrasonic spray pyrolysis exhibited (002) preferred growth orientation and had a visible-light penetration rate of more than 80%. After vacuum treatment, the ZnO reached a 1.0 × 10−3 Ωcm resistivity and a transmittance of 82%. The tribology behavior of ZnO showed that the vacuum-annealed coating had a low degree of wear and a low coefficient of friction as the uniformly distributed and dense coating increased its load capacity.
Fully solution-processed zinc oxide MIS capacitors by ultrasonic spray pyrolysis in air ambient
