Microstructural characteristics and crystallographic evolutions of Ga-doped ZnO films grown on sapphire substrates at high temperatures by RF magnetron sputtering

2009 ◽  
Vol 311 (22) ◽  
pp. 4641-4646 ◽  
Author(s):  
Ju Ho Lee ◽  
Young Yi Kim ◽  
Hyung Koun Cho ◽  
Jeong Yong Lee
Keyword(s):  
Magnetron Sputtering ◽  
High Temperatures ◽  
Rf Magnetron Sputtering ◽  
Zno Films ◽  
Microstructural Characteristics ◽  
Sapphire Substrates ◽  
Doped Zno

Characteristcs of Ga-Doped ZnO Films Prepared by RF Magnetron Sputtering in Ar + H2 Ambience

2008 ◽  
Vol E91-C (10) ◽  
pp. 1649-1652 ◽  
Author(s):  
K. MUTO ◽  
S. ODASHIMA ◽  
N. NASU ◽  
O. MICHIKAMI
Keyword(s):  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Zno Films ◽  
Doped Zno

Indium Doped ZnO Films Prepared by RF Magnetron Sputtering: Effect of Substrate Temperature on the Strain-Induced Band Gap

2012 ◽  
Vol 12 (3) ◽  
pp. 2503-2508 ◽  
Author(s):  
Georgi P. Daniel ◽  
David Devraj Kumar ◽  
V. B. Justinvictor ◽  
Prabitha B. Nair ◽  
K. Joy ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Substrate Temperature ◽  
Band Gap ◽  
Rf Magnetron Sputtering ◽  
Zno Films ◽  
Doped Zno

Influence of substrate temperature on N-doped ZnO films deposited by RF magnetron sputtering

2007 ◽  
Vol 515 (24) ◽  
pp. 8785-8788 ◽  
Author(s):  
Jinzhong Wang ◽  
Vincent Sallet ◽  
François Jomard ◽  
Ana M. Botelho do Rego ◽  
Elangovan Elamurugu ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Substrate Temperature ◽  
Rf Magnetron Sputtering ◽  
Zno Films ◽  
Doped Zno ◽  
Influence Of Substrate

Fabrication and properties of As-doped ZnO films grown on GaAs(0 0 1) substrates by radio frequency (rf) magnetron sputtering

2004 ◽  
Vol 221 (1-4) ◽  
pp. 32-37 ◽  
Author(s):  
Woong Lee ◽  
Deuk-Kyu Hwang ◽  
Min-Chang Jeong ◽  
Myeongkyu Lee ◽  
Min-Seok Oh ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Rf Magnetron Sputtering ◽  
Zno Films ◽  
Doped Zno

Spectroscopic ellipsometric determination of optical properties of V-Al co-doped ZnO films by rf magnetron sputtering

2013 ◽  
Vol 30 (4) ◽  
pp. 221-227 ◽  
Author(s):  
A. Sayari ◽  
L. El Mir ◽  
S. Al-Heniti ◽  
E. Shalaan ◽  
S. J. Yaghmour ◽  
...  
Keyword(s):  
Optical Properties ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Zno Films ◽  
Doped Zno ◽  
Co Doped

The effect of annealing on Al-doped ZnO films deposited by RF magnetron sputtering method for transparent electrodes

2010 ◽  
Vol 518 (11) ◽  
pp. 2941-2944 ◽  
Author(s):  
Hyung Jun Cho ◽  
Sung Uk Lee ◽  
Byungyou Hong ◽  
Yong Deok Shin ◽  
Jin Young Ju ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Zno Films ◽  
Transparent Electrodes ◽  
Doped Zno
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