New insights in microcrystalline silicon deposition with expanding thermal plasma chemical vapor deposition

2006 ◽  
Vol 352 (9-20) ◽  
pp. 933-936 ◽  
Author(s):  
R.A.C.M.M. van Swaaij ◽  
R. Jiménez Zambrano ◽  
C. Smit ◽  
M.C.M. van de Sanden
Keyword(s):  
Chemical Vapor Deposition ◽  
Thermal Plasma ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Microcrystalline Silicon ◽  
Plasma Chemical ◽  
Silicon Deposition ◽  
Plasma Chemical Vapor Deposition

scholarly journals Thermal Plasma Chemical Vapor Deposition of SiC.

1995 ◽  
Vol 35 (11) ◽  
pp. 1381-1387 ◽  
Author(s):  
Yoshitaka Kojima ◽  
Yasutaka Andoo ◽  
Masayuki Doi
Keyword(s):  
Chemical Vapor Deposition ◽  
Thermal Plasma ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition
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