Preparation of mesoporous oxide films via block copolymer templating

2010 ◽  
Vol 356 (2) ◽  
pp. 109-113 ◽  
Author(s):  
Nobuaki Kitazawa ◽  
Yoshihisa Watanabe
Keyword(s):  
Block Copolymer ◽  
Oxide Films ◽  
Mesoporous Oxide

Micromachining of mesoporous oxide films for microelectromechanical system structures

2002 ◽  
Vol 17 (8) ◽  
pp. 2121-2129 ◽  
Author(s):  
Jong-Ah Paik ◽  
Shih-Kang Fan ◽  
Chang-Jin Kim ◽  
Ming C. Wu ◽  
Bruce Dunn
Keyword(s):  
Sacrificial Layer ◽  
Oxide Films ◽  
Average Diameter ◽  
High Porosity ◽  
Mems Devices ◽  
Mesoporous Films ◽  
Microelectromechanical System ◽  
Mesoporous Oxide ◽  
Structure Layer ◽  
Mesoporous Oxides

The high porosity and uniform pore size of mesoporous oxide films offer unique opportunities for microelectromechanical system (MEMS) devices that require low density and low thermal conductivity. This paper provides the first report in which mesoporous films were adapted for MEMS applications. Mesoporous SiO2 and Al2O3 films were prepared by spin coating using block copolymers as the structure-directing agents. The resulting films were over 50% porous with uniform pores of 8-nm average diameter and an extremely smooth surface. The photopatterning and etching characteristics of the mesoporous films were investigated and processing protocols were established which enabled the films to serve as the sacrificial layer or the structure layer in MEMS devices. The unique mesoporous morphology leads to novel behavior including extremely high etching rates and the ability to etch underlying layers. Surface micromachining methods were used to fabricate three basic MEMS structures, microbridges, cantilevers, and membranes, from the mesoporous oxides.

scholarly journals Mesoporous oxide films grown on Sn foil using various anodizing modes in alkaline electrolyte

2021 ◽  
Vol 340 ◽  
pp. 01050
Author(s):  
Tatyana Vasilyeva ◽  
Nikolai Uvarov
Keyword(s):  
Tin Oxide ◽  
Voltage Drop ◽  
Oxide Films ◽  
Alkaline Electrolyte ◽  
Porous Structures ◽  
Simple Method ◽  
Galvanostatic Mode ◽  
Mesoporous Oxide ◽  
First Time

The mesoporous structures of tin oxide were obtained by a simple method of one-stage electrochemical anodizing of Sn foil in 1M NaOH in various anodizing modes. Anodizing in the pulse potentiostatic mode allowed determination of actual value of the voltage drop on the anode. For the first time the possibility of obtaining mesoporous oxide films on the surface of tin using galvanostatic mode of anodizing was demonstrated. It was found that the surface morphology of the obtained tin oxide layers is strongly dependent on the anodizing mode. Based on the data obtained, a two-stage mechanism was proposed for the growth of porous structures on the surface of tin in the galvanostatic mode including initial formation of the layer of SnO·xH2O which is subsequently oxidized to SnO2·xH2O mesoporouslayer.

Role of Amphiphilic Block Copolymer Composition on Pore Characteristics of Micelle-Templated Mesoporous Cobalt Oxide Films

Langmuir ◽  
2016 ◽  
Vol 32 (16) ◽  
pp. 4077-4085 ◽  
Author(s):  
Siyang Wang ◽  
Pattarasai Tangvijitsakul ◽  
Zhe Qiang ◽  
Sarang M. Bhaway ◽  
Kehua Lin ◽  
...  
Keyword(s):  
Block Copolymer ◽  
Cobalt Oxide ◽  
Oxide Films ◽  
Amphiphilic Block Copolymer ◽  
Copolymer Composition ◽  
Pore Characteristics

Long-Lived Photoinduced Charge Separation and Redox-Type Photochromism on Mesoporous Oxide Films Sensitized by Molecular Dyads

1999 ◽  
Vol 121 (6) ◽  
pp. 1324-1336 ◽  
Author(s):  
Pierre Bonhôte ◽  
Jacques-E. Moser ◽  
Robin Humphry-Baker ◽  
Nicolas Vlachopoulos ◽  
Shaik M. Zakeeruddin ◽  
...  
Keyword(s):  
Charge Separation ◽  
Oxide Films ◽  
Photoinduced Charge Separation ◽  
Molecular Dyads ◽  
Mesoporous Oxide ◽  
Photoinduced Charge

Development of Spin Coated Mesoporous Oxide Films for MEMS Structures

2004 ◽  
Vol 13 (1-3) ◽  
pp. 423-428 ◽  
Author(s):  
Jong-Ah Paik ◽  
Shih-Kang Fan ◽  
Hsin Chang ◽  
Chang-Jin Kim ◽  
Ming C. Wu ◽  
...  
Keyword(s):  
Oxide Films ◽  
Mesoporous Oxide

Transferrable superhydrophobic TiO2 nanorods on reduced graphene oxide films using block copolymer templates

2015 ◽  
Vol 26 (16) ◽  
pp. 165302 ◽  
Author(s):  
Myung-Seok Seo ◽  
Jin-Hyung Kim ◽  
Sung-Soo Kim ◽  
Heejung Kang ◽  
Byeong-Hyeok Sohn
Keyword(s):  
Graphene Oxide ◽  
Block Copolymer ◽  
Reduced Graphene Oxide ◽  
Oxide Films ◽  
Tio2 Nanorods ◽  
Reduced Graphene

Spectroscopic Studies of Electron Injection in Quantum Dot Sensitized Mesoporous Oxide Films

2010 ◽  
Vol 114 (44) ◽  
pp. 18866-18873 ◽  
Author(s):  
J. J. H. Pijpers ◽  
R. Koole ◽  
W. H. Evers ◽  
A. J. Houtepen ◽  
S. Boehme ◽  
...  
Keyword(s):  
Quantum Dot ◽  
Oxide Films ◽  
Electron Injection ◽  
Spectroscopic Studies ◽  
Mesoporous Oxide

Resolving Crystallites in Zirconium Oxide Films

1969 ◽  
Vol 27 ◽  
pp. 140-141
Author(s):  
R.A. Ploc
Keyword(s):  
Electron Microscope ◽  
Inelastic Scattering ◽  
Zirconium Oxide ◽  
Oxide Films ◽  
Optic Axis ◽  
Objective Lens ◽  
Microscope Objective ◽  
Linear Optic ◽  
A Current ◽  
Microscope Objective Lens

The optic axis of an electron microscope objective lens is usually assumed to be straight and co-linear with the mechanical center. No reason exists to assume such perfection and, indeed, simple reasoning suggests that it is a complicated curve. A current centered objective lens with a non-linear optic axis when used in conjunction with other lenses, leads to serious image errors if the nature of the specimen is such as to produce intense inelastic scattering.

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