The sol-gel process is applied to respectively prepare nano-TiO2films with Ce (cerium) or nano-TiO2films with Fe (ferium), which are used to degradate azo dye wastewater and present their characterization by XRD and HRTEM methods. The results show that proper amount of Ce or Fe doped into the nano-TiO2films can effectively accelerate the separation of photogenerated electrons-holes and easily form lattices, and consequently promotes nano-TiO2films' photocatalytic activity by nearly 20%.