Microstructure and optical properties of SiCN thin films deposited by reactive magnetron sputtering

Materials Letters ◽

10.1016/j.matlet.2014.05.152 ◽

2014 ◽

Vol 131 ◽

pp. 148-150 ◽

Author(s):

Yinqiao Peng ◽

Jicheng Zhou ◽

Jiehong Gong ◽

Qinrong Yu

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Sicn Thin Films

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Preparation and optical properties of SiCN thin films deposited by reactive magnetron sputtering

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-017-6373-0 ◽

2017 ◽

Vol 28 (9) ◽

pp. 6769-6781 ◽

Author(s):

Qiang Li ◽

Yingnan Wang ◽

Xutao Shan ◽

Xuewen Wang ◽

Wu Zhao

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Sicn Thin Films

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Structural and optical properties of the SiCN thin films prepared by reactive magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2010.11.166 ◽

2011 ◽

Vol 257 (9) ◽

pp. 4010-4013 ◽

Author(s):

Yinqiao Peng ◽

Jicheng Zhou ◽

Baoxing Zhao ◽

Xiaochao Tan ◽

Zhichao Zhang

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Structural And Optical Properties ◽

Sicn Thin Films

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Structure and optical properties of Cd-substituted ZnO (Zn1−x Cd x O) thin films synthesized by the dc reactive magnetron sputtering

Applied Physics A ◽

10.1007/s00339-014-8451-y ◽

2014 ◽

Vol 117 (2) ◽

pp. 895-900 ◽

Author(s):

Jinghai Yang ◽

Yonggao Yue ◽

Yingrui Sui ◽

Yan Cao ◽

Maobin Wei ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering

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Comparison of optical properties of TiO2 thin films prepared by reactive magnetron sputtering and electron-beam evaporation techniques

Semiconductor Physics Quantum Electronics & Optoelectronics ◽

10.15407/spqeo14.04.427 ◽

2011 ◽

Vol 14 (4) ◽

pp. 427-431 ◽

Author(s):

V. V. Brus ◽

◽

Keyword(s):

Optical Properties ◽

Electron Beam ◽

Magnetron Sputtering ◽

Electron Beam Evaporation ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Tio2 Thin Films

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Temperature dependence of the optical properties of mixed oxide thin films deposited by reactive magnetron sputtering

10.1117/12.625069 ◽

2005 ◽

Author(s):

M. Vergöhl ◽

B. Hunsche ◽

A. Ritz

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Temperature Dependence ◽

Mixed Oxide ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Oxide Thin Films

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Electrical and optical properties of tantalum oxide thin films prepared by reactive magnetron sputtering

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2011.08.019 ◽

2011 ◽

Vol 509 (41) ◽

pp. 9758-9763 ◽

Author(s):

A.X. Wei ◽

Z.X. Ge ◽

X.H. Zhao ◽

J. Liu ◽

Y. Zhao

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Tantalum Oxide ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Oxide Thin Films ◽

Electrical And Optical Properties

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Study of electrical and optical properties of CNx thin films deposited by reactive magnetron sputtering

Microelectronics Reliability ◽

10.1016/j.microrel.2011.03.031 ◽

2011 ◽

Vol 51 (7) ◽

pp. 1207-1212 ◽

Author(s):

E.L. Prociów ◽

T. Chodzinski

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Electrical And Optical Properties

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Influence of deposition conditions on optical properties of aluminum nitride (AlN) thin films prepared by DC-reactive magnetron sputtering

Materials Letters ◽

10.1016/s0167-577x(02)01106-0 ◽

2003 ◽

Vol 57 (13-14) ◽

pp. 1925-1933 ◽

Author(s):

Arshad Mahmood ◽

Nikifor Rakov ◽

Mufei Xiao

Keyword(s):

Optical Properties ◽

Aluminum Nitride ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering ◽

Deposition Conditions

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Structural and optical properties of diamond like thin films deposited by asymmetric bipolar pulsed-DC reactive magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2007.08.044 ◽

2008 ◽

Vol 202 (11) ◽

pp. 2354-2357 ◽

Author(s):

M. Rubio-Roy ◽

E. Pascual ◽

M.C. Polo ◽

J.L. Andújar ◽

E. Bertran

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Structural And Optical Properties ◽

Pulsed Dc ◽

Dc Reactive Magnetron Sputtering

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Optical properties of textured V2O5/Si thin films deposited by reactive magnetron sputtering

Optical Materials ◽

10.1016/j.optmat.2007.05.040 ◽

2008 ◽

Vol 30 (7) ◽

pp. 1145-1148 ◽

Author(s):

V.V. Atuchin ◽

B.M. Ayupov ◽

V.A. Kochubey ◽

L.D. Pokrovsky ◽

C.V. Ramana ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron

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