The influence of electron recombination rate on the plasma characteristics in rf argon capacitive discharge

2021 ◽  
Author(s):  
Abdelhak Missaoui ◽  
Morad El kaouini ◽  
Hassan Chatei
Keyword(s):  
Recombination Rate ◽  
Electron Recombination ◽  
Capacitive Discharge ◽  
Plasma Characteristics

scholarly journals Effect of phase angle on plasma characteristics in electrically asymmetric capacitive discharge

2018 ◽  
Vol 67 (22) ◽  
pp. 225203
Author(s):  
Hu Yan-Ting ◽  
Zhang Yu-Ru ◽  
Song Yuan-Hong ◽  
Wang You-Nian
Keyword(s):  
Phase Angle ◽  
Capacitive Discharge ◽  
Plasma Characteristics

scholarly journals Two- and Three-body Ion-Electron Recombination Rate Coefficients in Neon

1995 ◽  
Vol 48 (3) ◽  
pp. 503 ◽  
Author(s):  
RN Bhave ◽  
R Cooper
Keyword(s):  
Recombination Rate ◽  
Rate Coefficient ◽  
Rate Coefficients ◽  
Electron Recombination ◽  
Wide Range ◽  
Recombination Processes ◽  
Three Body ◽  
Modified Theory ◽  
Body Recombination ◽  
Monatomic Gas

The rates of recombination of electrons with Net ions over a wide range of pressure (1001000 Torr) and at temperatures of 133, 233 and 295 K were measured. Two- and three-body recombination processes were resolved. The observed two-body rate coefficient is lower than earlier reports. The three-body rate measured agrees well with predictions from Flarinery's modified theory by Bates for termolecular ion-electron recombination in a monatomic gas.

Thermograms of high-frequency capacitive discharge between solid and liquid electrodes

2018 ◽  
Vol 56 (5) ◽  
pp. 891-894
Author(s):  
Az. Gaisin ◽  
◽  
F. Gaisin ◽  
Al. Gaisin ◽  
L. Bagautdinova ◽  
...  
Keyword(s):  
High Frequency ◽  
Capacitive Discharge ◽  
Liquid Electrodes
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