Multilayer SiO2 crystals modified by alkoxysilanes were fabricated by the vertical deposition
technique combined with self-assembly method. The SiO2 colloidal crystallization was prepared by the
traditional Stöber-Fink-Bohn method, and modified by different alkoxysilanes to investigate the
properties of the films. The films fabricated by the ordering of SiO2 spheres were investigated by infrared
spectrometer, X-ray diffraction, scanning electron microscope, UV-visible spectrophotometer. The
results showed that thin film is the face-centered cubic structures and the spheres are [111]-oriented.