Residual stress effect on coupling electromechanical factor of epitaxial Barium Strontium Titanate (BST) thin films

Subscript textReactive ion etching of barium strontium titanate (BST) thin films using an SF6/Ar plasma has been studied. BST surfaces before and after etching were analyzed by X-ray photoelectron spectroscopy to investigate the reaction ion etching mechanism, and chemical reactions had occurred between the F plasma and the Ba, Sr and Ti metal species. Fluorides of these metals were formed and some remained on the surface during the etching process. Ti can be removed completely by chemical reaction because the TiF4by-product is volatile. Minor quantities of Ti-F could still be detected by narrow scan X-ray photoelectron spectra, which was thought to be present in metal-oxy-fluoride(Metal-O-F). These species were investigated from O1sspectra, and a fluoride-rich surface was formed during etching because the high boiling point BaF2and SrF2residues are hard to remove. The etching rate was limited to 14.28nm/min. A 1-minute Ar/10 plasma physical sputtering was carried out for every 4 minutes of surface etching, which effectively removed remaining surface residue. Sequential chemical reaction and sputtered etching is an effective etching method for BST films.

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Etching mechanism of barium strontium titanate (BST) thin films in CHF3/Ar plasma

Chinese Science Bulletin ◽

10.1007/s11434-011-4561-5 ◽

2011 ◽

Vol 56 (21) ◽

pp. 2267-2271 ◽

Cited By ~ 7

Author(s):

LiPing Dai ◽

ShuYa Wang ◽

Ping Shu ◽

ZhiQin Zhong ◽

Gang Wang ◽

...

Keyword(s):

Thin Films ◽

Strontium Titanate ◽

Barium Strontium Titanate ◽

Bst Thin Films ◽

Etching Mechanism ◽

Barium Strontium ◽

Ar Plasma

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Electrode Field Penetration: A New Interpretation of Tunneling Currents in Barium Strontium Titanate (BST) Thin Films

Ferroelectrics ◽

10.1080/713715991 ◽

2002 ◽

Vol 268 (1) ◽

pp. 35-40 ◽

Cited By ~ 4

Author(s):

Matthew Dawber ◽

L. J. Sinnamon ◽

J. F. Scott ◽

J. M. Gregg

Keyword(s):

Thin Films ◽

Strontium Titanate ◽

Barium Strontium Titanate ◽

Bst Thin Films ◽

Barium Strontium ◽

Tunneling Currents ◽

New Interpretation ◽

Field Penetration

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RELIABILITY OF BARIUM STRONTIUM TITANATE (BST) THIN FILMS

Integrated Ferroelectrics ◽

10.1080/10584580903038275 ◽

2009 ◽

Vol 105 (1) ◽

pp. 11-17 ◽

Cited By ~ 4

Author(s):

HONGWEI CHEN ◽

CHUANREN YANG ◽

BO WANG ◽

JIHUA ZHANG ◽

AN YU

Keyword(s):

Thin Films ◽

Strontium Titanate ◽

Barium Strontium Titanate ◽

Bst Thin Films ◽

Barium Strontium

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Microstructure-induced Schottky barrier effects in barium strontium titanate (BST) thin films for 16 and 64 Mbit (DRAM cells)

ISAF '92: Proceedings of the Eighth IEEE International Symposium on Applications of Ferroelectrics ◽

10.1109/isaf.1992.300707 ◽

2003 ◽

Cited By ~ 6

Author(s):

J.F. Scott ◽

M. Azuma ◽

E. Fujii ◽

T. Otsuki ◽

G. Kano ◽

...

Keyword(s):

Thin Films ◽

Schottky Barrier ◽

Strontium Titanate ◽

Barium Strontium Titanate ◽

Bst Thin Films ◽

Barrier Effects ◽

Barium Strontium

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OPTICAL AND STRUCTURAL PROPERTIES OF NANO-SIZED BARIUM STRONTIUM TITANATE (Ba0.6Sr0.4TiO3) THIN FILM

Modern Physics Letters B ◽

10.1142/s0217984908015164 ◽

2008 ◽

Vol 22 (09) ◽

pp. 693-700 ◽

Cited By ~ 12

Author(s):

S. BOBBY SINGH ◽

H. B. SHARMA ◽

H. N. K. SARMA ◽

SUMITRA PHANJOUBAM

Keyword(s):

Thin Films ◽

Strontium Titanate ◽

Barium Strontium Titanate ◽

Sol Gel ◽

Processing Technique ◽

Cubic Phase ◽

Bst Thin Films ◽

Barium Strontium ◽

Free Films ◽

Quartz Substrates

Barium strontium titanate ( Ba 0.6 Sr 0.4 TiO 3) or BST thin films on quartz substrates have been prepared by using a modified sol-gel processing technique. The starting materials are barium 2-ethylhexanoate Ba[CH 3( CH 2)3 CH(C 2 H 5) CO 2]2, strontium 2-ethylhexanoate Sr[CH 3( CH 2)3 CH(C 2 H 5) CO 2]2 and titanium (IV) isopropoxide Ti[CH 3 CH 3 CHO ]4. The precursors Ti[CH 3 CH 3 CHO ]4 except were synthesized in the laboratory. Transparent and crack-free films were fabricated on quartz substrates by spin coating. The as-fired films were found to be amorphous, which crystallized to cubic phase after annealing at 550°C in air for 1 hr. In this paper, we report the structural and optical properties of BST thin films prepared by the modified sol-gel process.

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