Fabrication and characterization of SMA film actuator array with bias spring for high-power MEMS tactile display
2004 ◽
Vol 51
(12)
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pp. 2211-2216
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2020 ◽
Vol 387
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pp. 125489
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2015 ◽
Vol 25
(6)
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pp. 279-287
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2010 ◽
Vol 27
(5)
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pp. 054204
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