Plasma assisted metal-organic chemical vapor deposition of hard chromium nitride thin film coatings using chromium(III) acetylacetonate as the precursor
2004 ◽
Vol 374
(1-2)
◽
pp. 362-368
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2009 ◽
Vol 311
(17)
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pp. 4188-4192
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2009 ◽
Vol 321
(23)
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pp. 3833-3838
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2019 ◽
Vol 88
(1)
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pp. 10301
2001 ◽
Vol 40
(Part 2, No. 5A)
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pp. L460-L462
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1989 ◽
Vol 28
(Part 1, No. 5)
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pp. 814-818
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