Thermal annealing effect on zinc nitride thin films deposited by reactive rf-magnetron sputtering process

2013 ◽  
Vol 16 (2) ◽  
pp. 318-325 ◽  
Author(s):  
Ting Wen ◽  
Madhav Gautam ◽  
Amir M. Soleimanpour ◽  
Ahalapitiya H. Jayatissa
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Thermal Annealing ◽  
Rf Magnetron Sputtering ◽  
Annealing Effect ◽  
Zinc Nitride ◽  
Reactive Rf Magnetron Sputtering

Highly transparent zinc nitride thin films by RF magnetron sputtering with enhanced optoelectronic behavior

2018 ◽  
Vol 232-235 ◽  
pp. 33-40 ◽  
Author(s):  
Karthik Kumar Chinnakutti ◽  
Shyju Thanharaj Salammal ◽  
Vengatesh Panneerselvam ◽  
Kuppusami Parasuraman ◽  
Vinita Vishwakarma ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Zinc Nitride

Zinc nitride films prepared by reactive RF magnetron sputtering of zinc in nitrogen containing atmosphere

2012 ◽  
Vol 45 (13) ◽  
pp. 135101 ◽  
Author(s):  
Nanke Jiang ◽  
Daniel G Georgiev ◽  
Ahalapitiya H Jayatissa ◽  
Robert W Collins ◽  
Jie Chen ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Zinc Nitride ◽  
Reactive Rf Magnetron Sputtering

Optical band gap of zinc nitride films prepared by reactive rf magnetron sputtering

2006 ◽  
Vol 41 (9) ◽  
pp. 889-892 ◽  
Author(s):  
Wei Du ◽  
Fujian Zong ◽  
Honglei Ma ◽  
Jin Ma ◽  
Min Zhang ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Band Gap ◽  
Optical Band Gap ◽  
Rf Magnetron Sputtering ◽  
Zinc Nitride ◽  
Reactive Rf Magnetron Sputtering

Cu/TiO2 thin films prepared by reactive RF magnetron sputtering

2015 ◽  
Vol 120 (2) ◽  
pp. 765-773 ◽  
Author(s):  
M. Sreedhar ◽  
I. Neelakanta Reddy ◽  
Parthasarathi Bera ◽  
D. Ramachandran ◽  
K. Gobi Saravanan ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Tio2 Thin Films ◽  
Reactive Rf Magnetron Sputtering
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