Micro-ultrasonic drilling of monocrystalline silicon: An experimental investigation on machined surface topography and optimization using User's preference rating based TOPSIS
2019 ◽
Vol 102
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pp. 104584
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2021 ◽
Vol 292
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pp. 117065
Keyword(s):
1991 ◽
Vol 113
(2)
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pp. 145-153
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2018 ◽
Vol 121
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pp. 321-332
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Keyword(s):
2013 ◽
Vol 49
(06)
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pp. 171
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