scholarly journals “Spiral COSAMI” — A Multi-Undulator Compact Source for Actinic Mask Inspection in the extreme ultraviolet range

Author(s):  
Albin F. Wrulich ◽  
Andreas Streun ◽  
Leonid Rivkin
2018 ◽  
Vol 189 (03) ◽  
pp. 323-334 ◽  
Author(s):  
D.B. Abramenko ◽  
P.S. Antsiferov ◽  
D.I. Astakhov ◽  
Aleksandr Yu. Vinokhodov ◽  
Il'ya Yu. Vichev ◽  
...  

2015 ◽  
Vol 4 (4) ◽  
Author(s):  
Hiroo Kinoshita ◽  
Takeo Watanabe ◽  
Tetsuo Harada

AbstractThirty years have passed since the first report on extreme ultraviolet lithography (EUVL) was presented at the annual meeting of the Japanese Society of Applied Physics in 1986. This technology is now in the manufacturing development stage. The high-volume manufacturing of dynamic-random-access-memory (DRAM) chips with a line width of 15 nm is expected in 2016. However, there are critical development issues that remain: generating a stand-alone EUV source with a higher power and producing a mask inspection tool for obtaining zero-defect masks. The Center for EUVL at the University of Hyogo was established in 2010. At present, it utilizes various types of equipment, such as an EUV mask defect inspection tool, an interference-lithography system, a device for measuring the thickness of carbon contamination film deposited by resist outgassing, and reflectivity measurement systems.


2019 ◽  
Vol 44 (20) ◽  
pp. 4949
Author(s):  
D. B. Abramenko ◽  
P. S. Antsiferov ◽  
L. A. Dorokhin ◽  
V. V. Medvedev ◽  
Yu. V. Sidelnikov ◽  
...  

Author(s):  
K. A. Goldberg ◽  
P. Naulleau ◽  
I. Mochi ◽  
E. H. Anderson ◽  
S. B. Rekawa ◽  
...  

2019 ◽  
Vol 127 (8) ◽  
pp. 291
Author(s):  
R.A. Ganeev

Any new synthesized semiconductor nanoparticles or quantum dots (QDs) require to be examined under different conditions using laser pulses of variable energies, wavelengths and durations to understand the nonlinear optical mechanisms and distinguish their attractive properties for practical applications. Among various QDs the metal sulfides took special attention due to their advanced nonlinear optical properties. Additionally, laser ablation can readily produce plasmas containing QDs that could be used for different applications. One of them is that they can be used as emitters for harmonic generation from ultrashort laser pulses. Here we review recent studies of different low- and high-order optical nonlinearities of metal sulfide QDs, such as optical limiting, two-photon, saturable and reverse saturable types of nonlinear absorption, nonlinear refraction, and generation of high-order harmonics in extreme ultraviolet range.


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