Simulation and experimental study of CVD process for low temperature nanocrystalline silicon carbide coating
2016 ◽
Vol 303
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pp. 122-131
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2001 ◽
Vol 184
(1-4)
◽
pp. 150-155
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2000 ◽
Vol 69-70
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pp. 530-535
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2007 ◽
Vol 46
(4A)
◽
pp. 1415-1426
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2015 ◽
Vol 44
(3)
◽
pp. 922-928
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2020 ◽
Vol 577
◽
pp. 411788
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