Structural and optical properties of N-doped β-Ga2O3 films deposited by RF magnetron sputtering

2011 ◽  
Vol 406 (15-16) ◽  
pp. 3079-3082 ◽  
Author(s):  
Yijun Zhang ◽  
Jinliang Yan ◽  
Qingshan Li ◽  
Chong Qu ◽  
Liying Zhang ◽  
...  
Keyword(s):  
Optical Properties ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Structural And Optical Properties

Structural and optical properties of Nb-doped β-Ga2O3 thin films deposited by RF magnetron sputtering

Vacuum ◽  
2017 ◽  
Vol 146 ◽  
pp. 93-96 ◽  
Author(s):  
Hao Zhang ◽  
Jinxiang Deng ◽  
Zhiwei Pan ◽  
Zhiying Bai ◽  
Le Kong ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Structural And Optical Properties
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