Effect of substrates temperature on structural and optical properties indium tin oxide prepared by RF magnetron sputtering

2016 ◽  
Author(s):  
Mohammad Farid Bin Mohd Nasir ◽  
Mohamad Hafiz Mamat
Keyword(s):  
Optical Properties ◽  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Rf Magnetron Sputtering ◽  
Structural And Optical Properties

Structural and Optical Properties of Nickel (Ni)/indium Tin Oxide (ITO) Thin-Films Deposited by RF Magnetron Sputtering

2014 ◽  
Vol 895 ◽  
pp. 181-185 ◽  
Author(s):  
M. Sobri ◽  
A. Shuhaimi ◽  
M. Mazwan ◽  
K.M. Hakim ◽  
S. Najwa ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Seed Layer ◽  
Rf Magnetron Sputtering ◽  
Sample Surface ◽  
Deposition Parameter ◽  
Ito Thin Films

Nickel (Ni)/ indium tin oxide (ITO) thin-films have been deposited on silicon (Si) and glass substrates using radio-frequency (RF) magnetron sputtering at 200°C temperature. ITO layer was deposited on top of Ni layer with various deposition parameter. The material and optical properties of the ITO samples with and without Ni seed layer were analyzed. X-ray diffraction studies shows that the films are crystalline with the typical ITO diffraction peaks of (222), (400) and (411). The FESEM and AFM images shows that the grains have uniform shapes and sizes. FESEM results reveal that the grain size along the sample surface decreases when the Ni seed layer is added. Both the samples shows higher transmittance of more than 95% in UV-vis spectrometer.

Structural and optical properties of N-doped β-Ga2O3 films deposited by RF magnetron sputtering

2011 ◽  
Vol 406 (15-16) ◽  
pp. 3079-3082 ◽  
Author(s):  
Yijun Zhang ◽  
Jinliang Yan ◽  
Qingshan Li ◽  
Chong Qu ◽  
Liying Zhang ◽  
...  
Keyword(s):  
Optical Properties ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Structural And Optical Properties

Characteristics of Indium Tin Oxide Films Deposited by DC and RF Magnetron Sputtering

2001 ◽  
Vol 40 (Part 1, No. 5A) ◽  
pp. 3364-3369 ◽  
Author(s):  
Wenli Deng ◽  
Taizo Ohgi ◽  
Hitoshi Nejo ◽  
Daisuke Fujita
Keyword(s):  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Films ◽  
Rf Magnetron Sputtering ◽  
Tin Oxide Films

Structural and Optical Properties of AgInSe2 Films Prepared on Indium Tin Oxide Substrates

2007 ◽  
Vol 50 (4) ◽  
pp. 1099 ◽  
Author(s):  
Jeoung Ju Lee ◽  
Jong Duk Lee ◽  
Byeong Yeol Ahn ◽  
Hyeon Soo Kim ◽  
Kun Ho Kim
Keyword(s):  
Optical Properties ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Structural And Optical Properties ◽  
Oxide Substrates
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