Deposition of organosilicon coatings from trimethylsilyl acetate and oxygen gases in capacitively coupled RF glow discharge

2020 ◽  
Vol 149 ◽  
pp. 105927
Author(s):  
Štěpánka Kelarová ◽  
Vojtěch Homola ◽  
Monika Stupavká ◽  
Martin Čermák ◽  
Jiří Vohánka ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Capacitively Coupled ◽  
Rf Glow Discharge

Detailed Study of Ion Bombardment in Rf Glow Discharge Deposition Systems: The Role of Helium Dilution

1989 ◽  
Vol 149 ◽  
Author(s):  
P. Roca I Cabarrocas
Keyword(s):  
Glow Discharge ◽  
Effective Means ◽  
Ion Bombardment ◽  
Electrostatic Energy ◽  
Ion Energy ◽  
Capacitively Coupled ◽  
Ion Energy Distribution ◽  
Reactor Geometry ◽  
Rf Glow Discharge ◽  
Argon Dilution

ABSTRACTWe present a detailed study of the variables (reactor geometry, gas pressure, rf power and silane dilution) which control the flux and energy of the ions impinging on the substrate in capacitively-coupled rf glow discharge systems. The ion flux and ion energy, measured with an electrostatic energy analyzer, were found to be largely dependent on the reactor geometry, which was quantified by the ratio of the area of the grounded surfaces Sg to the area of the rf electrode Sc. Special attention was paid to the effects of the dilution of silane in hydrogen, helium and argon. Helium and hydrogen dilution were found the most effective means to increase ion bombardment while argon dilution has little effect on the ion energy distribution. Furthermore, it is likely that ion bombardment at moderate energy (Eion < 70 eV) does not induce any serious degradation of the electronic properties of a-Si:H films.

Growth of carbon with vertically aligned nanoscale flake structure in capacitively coupled rf glow discharge

Vacuum ◽  
2008 ◽  
Vol 82 (8) ◽  
pp. 754-759 ◽  
Author(s):  
Hui Zhang ◽  
Naoto Kikuchi ◽  
Toshihiro Kogure ◽  
Eiji Kusano
Keyword(s):  
Glow Discharge ◽  
Capacitively Coupled ◽  
Rf Glow Discharge ◽  
Vertically Aligned ◽  
Flake Structure

Current-voltage characteristics of aluminium nitride films formed by RF glow discharge

1980 ◽  
Vol 13 (6) ◽  
pp. L101-L105 ◽  
Author(s):  
D Mangalaraj ◽  
M Radhakrishnan ◽  
C Balasubramanian ◽  
A R Kasilingam
Keyword(s):  
Glow Discharge ◽  
Aluminium Nitride ◽  
Current Voltage ◽  
Rf Glow Discharge ◽  
Current Voltage Characteristics

Microcrystalline Silicon Films Deposited by Cathode‐Type RF Glow Discharge Technique

1995 ◽  
Vol 142 (5) ◽  
pp. 1663-1666 ◽  
Author(s):  
Ahalapitiya Hewage Jayatissa ◽  
Yoichiro Nakanishi ◽  
Yosinori Hatanaka
Keyword(s):  
Glow Discharge ◽  
Silicon Films ◽  
Microcrystalline Silicon ◽  
Rf Glow Discharge

scholarly journals Influence of electrodes area ratios and the discharge volume in RF capacitively coupled plasma

2019 ◽  
Vol 11 (20) ◽  
pp. 1-8
Author(s):  
Moyad Abdullah Ahmad
Keyword(s):  
Glow Discharge ◽  
Cone Angle ◽  
Experimental Results ◽  
Rf Power ◽  
Capacitively Coupled ◽  
Discharge Volume ◽  
Capacitively Coupled Plasma ◽  
Harmonic Distortions

Experimental results on harmonic distortions in 13.56 MHz RF Argon glow discharge using different grounded electrodes areas and electrodes spacing are presented. The experiment is carried out at four pressure values. RF power values used are between 20 and 90 watts. The results indicate significant increase in distortions at two specific values of the cone angle enclosing the two electrodes within its geometrical volume. The computation of the cone head angle gave the symmetry discharge or asymmetry as well as when the angle is small the condition is near symmetry discharge associated with decrease in the nonlinearity.

Stabilized aqueous dispersion of multi-walled carbon nanotubes obtained by RF glow-discharge treatment

2009 ◽  
Vol 11 (7) ◽  
pp. 1817-1822 ◽  
Author(s):  
Leron Vandsburger ◽  
Edward J. Swanson ◽  
Jason Tavares ◽  
Jean-Luc Meunier ◽  
Sylvain Coulombe
Keyword(s):  
Carbon Nanotubes ◽  
Glow Discharge ◽  
Aqueous Dispersion ◽  
Discharge Treatment ◽  
Multi Walled Carbon Nanotubes ◽  
Rf Glow Discharge ◽  
Walled Carbon Nanotubes
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