Investigation on flatness and surface integrity of pure copper processed by electrochemical mechanical polishing
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2019 ◽
Vol 8
(11)
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pp. P699-P703
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2011 ◽
Vol 314-316
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pp. 1846-1850
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Vol 24
(2)
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pp. 343-349
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2019 ◽
Vol 144
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pp. 103431
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2008 ◽
Vol 155
(7)
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pp. H520
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2009 ◽
Vol 54
(27)
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pp. 6808-6815
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2018 ◽
Vol 271
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pp. 666-676
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