An NiCr Alloy Piezoresistive Atmosphere Pressure Sensor based on Eutectic

In this paper, a SOI-MEMS (silicon on insulator- micro electro mechanical system) pizeoresistive atmosphere pressure sensor is presented using anodic bonding. Differently from the prevailing fabrication process of silicon piezoresistive pressure sensor: the device layer monocrystalline of SOI silicon wafer is used as the strain gauge with a simple deep etching process; and the SiO2 layer of SOI silicon wafer as the insulator between strain gauge and substrate. The whole fabrication processes of the designed sensor are very simple, and can reduce the cost of sensor. The Pressure-Voltage characteristic test results suggest a precision within 0.14% in linear fitting. It is shown that the temperature coefficient is 2718ppm/°C from the Typical temperature curve of the pressure sensors.

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Temperature Characteristic of Platinum Piezoresistive Pressure Sensor

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.483.180 ◽

2011 ◽

Vol 483 ◽

pp. 180-184 ◽

Cited By ~ 1

Author(s):

Li Dong Du ◽

Li Xiao ◽

Zhan Zhao ◽

Zhen Fang ◽

Jing Xu ◽

...

Keyword(s):

Thermal Expansion ◽

Pressure Sensor ◽

Adhesive Bonding ◽

Temperature Characteristic ◽

Bonding Layer ◽

Resistance Change ◽

Atmosphere Pressure ◽

Piezoresistive Pressure Sensor ◽

Sensing Material ◽

The Relationship

Temperature characteristic of platinum piezoresistive atmosphere pressure sensor is studied in this paper, in which platinum is used as the sensing material and SU-8 is used as adhesive bonding layer. Normally, temperature variation will bring on resistance change of sensing platinum resistor with a linear relationship. Simultaneously, the thermal expansion mismatching in different material will also change the resistance. They both affect the temperature characteristic of sensor. Based on elasticity theory, the relationship between resistance change and thermal expansion mismatching is analyzed and is not linear. Sum of two parts resistance change is still nonlinear. Because the output of atmosphere pressure sensor is proportional to resistance change, relationship between output and temperature change is also nonlinear. The analysis is consistent with the experimental results.

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A SOI-MEMS atmosphere pressure sensor and its low stress packaging

The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) ◽

10.1109/nems.2014.6908848 ◽

2014 ◽

Cited By ~ 1

Author(s):

Lidong Du ◽

Mengying Zhang ◽

Zhan Zhao ◽

Liang Li ◽

Cheng Liu ◽

...

Keyword(s):

Pressure Sensor ◽

Atmosphere Pressure

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Analysis Temperature Characteristics of Atmosphere Pressure Sensor Caused by Residual Gas

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.645-646.504 ◽

2015 ◽

Vol 645-646 ◽

pp. 504-508

Author(s):

Li Dong Du ◽

Zhan Zhao ◽

Shao Hua Wu ◽

Zhen Fang

Keyword(s):

Pressure Sensor ◽

Temperature Characteristic ◽

Order Derivative ◽

Atmosphere Pressure ◽

Nickel Chromium ◽

Residual Gas ◽

Relative Change ◽

The Relationship ◽

Gas Balance ◽

Relationship Equation

In this paper, temperature characteristic of a previous developed nickel-chromium (Ni-Cr) thin film atmosphere pressure sensor is analyzed caused by residual gas. As expected, the output signal of the previous fabricated sensor increases with atmosphere pressures. But when pressure load is fixed, the voltage-temperature characteristic is nonlinear. One factor of this effect is residual gas. Based on the pressure-displacement equation of membrane, the gas balance equation and Provided that the deformation of membrane is spherical crown, the relationship equation of relative change of piezoresistor is defined. Studying the First order derivative and second order derivative of relationship equation of relative change of piezoresistor, it is proved that the residual gas will affect the temperature characteristic of previous designed sensor.

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