In situ phosphorus-doped polycrystalline silicon films by low pressure chemical vapor deposition for contact passivation of silicon solar cells

Vapor Deposition ◽

Polycrystalline Silicon ◽

Chemical Vapor ◽

Silicon Solar Cells ◽

Pressure Chemical ◽

Characterization of In Situ Phosphorus‐Doped Polycrystalline Silicon Films Grown by Disilane‐Based Low‐Pressure Chemical Vapor Deposition

Journal of The Electrochemical Society ◽

10.1149/1.1838117 ◽

1997 ◽

Vol 144 (11) ◽

pp. 3952-3958 ◽

Cited By ~ 10

Author(s):

J. V. Grahn ◽

J. Pejnefors ◽

M. Sandén ◽

S.‐L. Zhang ◽

M. Östling

Keyword(s):

Vapor Deposition ◽

Polycrystalline Silicon ◽

Chemical Vapor ◽

Low Pressure ◽

Pressure Chemical ◽

Structural and mechanical characterization of in-situ phosphorus-doped rapid transport low pressure chemical vapor deposition polycrystalline silicon films

Microelectronics Journal ◽

10.1016/s0026-2692(99)00014-2 ◽

1999 ◽

Vol 30 (7) ◽

pp. 699-703 ◽

Cited By ~ 2

Author(s):

S. Kallel ◽

B. Semmache ◽

M. Lemiti ◽

H. Jaffrezic ◽

A. Laugier

Keyword(s):

Vapor Deposition ◽

Polycrystalline Silicon ◽

Mechanical Characterization ◽

Chemical Vapor ◽

Pressure Chemical ◽

Rapid Transport ◽

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

Moderately in situ phosphorus-doped polycrystalline silicon by single wafer reduced pressure chemical vapor deposition

10.1116/1.590012 ◽

1998 ◽

Vol 16 (3) ◽

pp. 1082

Author(s):

Katherine E. Violette

Keyword(s):

Vapor Deposition ◽

Polycrystalline Silicon ◽

Chemical Vapor ◽

Reduced Pressure ◽

Pressure Chemical ◽

In Situ Phosphorus-Doped Poly-Si by Low Pressure Chemical Vapor Deposition for Passivating Contacts

2020 47th IEEE Photovoltaic Specialists Conference (PVSC) ◽

10.1109/pvsc45281.2020.9300543 ◽

2020 ◽

Author(s):

Meric Firat ◽

Hariharsudan Sivaramakrishnan Radhakrishnan ◽

Maria Recaman Payo ◽

Filip Duerinckx ◽

Rajiv Sharma ◽

...

Keyword(s):

Vapor Deposition ◽

Chemical Vapor ◽

Low Pressure ◽

Pressure Chemical ◽

Present status of micro- and polycrystalline silicon solar cells made by hot-wire chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2003.10.126 ◽

2004 ◽

Vol 451-452 ◽

pp. 455-465 ◽

Cited By ~ 59

Author(s):

Ruud E.I. Schropp

Keyword(s):

Solar Cells ◽

Vapor Deposition ◽

Present Status ◽

Polycrystalline Silicon ◽

Chemical Vapor ◽

Silicon Solar Cells ◽

Hot Wire

Chemical vapor deposition of undoped and in-situ boron- and arsenic-doped epitaxial and polycrystalline silicon films grown using silane at reduced pressure

Journal of Applied Physics ◽

10.1063/1.373867 ◽

2000 ◽

Vol 88 (3) ◽

pp. 1655-1663 ◽

Cited By ~ 13

Author(s):

J. Pejnefors ◽

S.-L. Zhang ◽

H. H. Radamson ◽

J. V. Grahn ◽

M. Östling

Keyword(s):

Vapor Deposition ◽

Polycrystalline Silicon ◽

Chemical Vapor ◽

Silicon Films ◽

Reduced Pressure ◽

Polycrystalline Silicon Films

Structural and electrical properties of polycrystalline silicon films deposited by low pressure chemical vapor deposition with and without plasma enhancement

Journal of Electronic Materials ◽

10.1007/bf02659023 ◽

1986 ◽

Vol 15 (5) ◽

pp. 279-285 ◽

Cited By ~ 8

Author(s):

J. -J. Hajjar ◽

R. Reif ◽

D. Adler

Keyword(s):

Electrical Properties ◽

Vapor Deposition ◽

Polycrystalline Silicon ◽

Chemical Vapor ◽

Low Pressure ◽

Structural And Electrical Properties ◽

Pressure Chemical ◽

Plasma Enhancement

Application of hydrosilane-free atmospheric pressure chemical vapor deposition of SiOx films in the manufacture of crystalline silicon solar cells

Thin Solid Films ◽

10.1016/j.tsf.2020.138338 ◽

2020 ◽

Vol 713 ◽

pp. 138338

Author(s):

Esmail Issa ◽

Henning Nagel ◽

Jonas Bartsch ◽

Markus Glatthaar ◽

Edda Rädlein

Keyword(s):

Solar Cells ◽

Vapor Deposition ◽

Atmospheric Pressure ◽

Crystalline Silicon ◽

Chemical Vapor ◽

Silicon Solar Cells ◽

Crystalline Silicon Solar Cells ◽

Pressure Chemical

Performance improvement of p-type silicon solar cells with thin silicon films deposited by low pressure chemical vapor deposition method

Solar Energy ◽

10.1016/j.solener.2012.12.001 ◽

2013 ◽

Vol 88 ◽

pp. 104-109 ◽

Cited By ~ 18

Author(s):

Ching-Tao Li ◽

Fangchi Hsieh ◽

Likarn Wang

Keyword(s):

Solar Cells ◽

Performance Improvement ◽

Vapor Deposition ◽

Chemical Vapor ◽

Silicon Solar Cells ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Pressure Chemical ◽

P Type

Atmospheric Pressure Chemical Vapor Deposition and characterization of TiO2 antireflection coatings for monocrystalline silicon solar cells

2011 International Conference on Clean Electrical Power (ICCEP) ◽

10.1109/iccep.2011.6036368 ◽

2011 ◽

Cited By ~ 1

Author(s):

D. Hocine ◽

M. Pasquinelli ◽

L. Escoubas ◽

P. Torchio ◽

A. Moreau ◽

...

Keyword(s):

Solar Cells ◽

Vapor Deposition ◽

Atmospheric Pressure ◽

Chemical Vapor ◽

Monocrystalline Silicon ◽

Silicon Solar Cells ◽

Antireflection Coatings ◽

Pressure Chemical