Mass sensitivity of thin film bulk acoustic resonator sensors based on polarc-axis tilted zinc oxide and aluminum nitride thin film

Journal of Applied Physics ◽

10.1063/1.3483245 ◽

2010 ◽

Vol 108 (10) ◽

pp. 104510 ◽

Author(s):

Lifeng Qin ◽

Qing-Ming Wang

Keyword(s):

Thin Film ◽

Aluminum Nitride ◽

Acoustic Resonator ◽

Mass Sensitivity ◽

Film Bulk Acoustic Resonator ◽

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Spurious Suppression without Energy Dissipation in Aluminum–Nitride-Based Thin-Film Bulk Acoustic Resonator Using Thin Ring on Electrode Edge

Japanese Journal of Applied Physics ◽

10.1143/jjap.51.07gc11 ◽

2012 ◽

Vol 51 ◽

pp. 07GC11 ◽

Author(s):

Motoaki Hara ◽

Hiroki Kuwano

Keyword(s):

Thin Film ◽

Energy Dissipation ◽

Aluminum Nitride ◽

Acoustic Resonator ◽

Thin Ring ◽

Film Bulk Acoustic Resonator ◽

Film Bulk ◽

Spurious Suppression ◽

Electrode Edge ◽

Without Energy Dissipation

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Spurious Suppression without Energy Dissipation in Aluminum–Nitride-Based Thin-Film Bulk Acoustic Resonator Using Thin Ring on Electrode Edge

Japanese Journal of Applied Physics ◽

10.7567/jjap.51.07gc11 ◽

2012 ◽

Vol 51 (7S) ◽

pp. 07GC11 ◽

Author(s):

Motoaki Hara ◽

Hiroki Kuwano

Keyword(s):

Thin Film ◽

Energy Dissipation ◽

Aluminum Nitride ◽

Acoustic Resonator ◽

Thin Ring ◽

Film Bulk Acoustic Resonator ◽

Film Bulk ◽

Spurious Suppression ◽

Electrode Edge ◽

Without Energy Dissipation

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Aluminum nitride based thin film bulk acoustic resonator using germanium sacrificial layer etching

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) ◽

10.1109/sensor.2003.1217131 ◽

2004 ◽

Author(s):

M. Hara ◽

J. Kuypers ◽

T. Abe ◽

M. Esashi

Keyword(s):

Thin Film ◽

Aluminum Nitride ◽

Sacrificial Layer ◽

Acoustic Resonator ◽

Film Bulk Acoustic Resonator ◽

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Design and Simulation of a Zinc Oxide Thin Film Bulk Acoustic Resonator Filter for 2.6 GHz Band Applications

IETE Journal of Research ◽

10.1080/03772063.2015.1062734 ◽

2015 ◽

Vol 62 (1) ◽

pp. 3-8 ◽

Author(s):

Jyotirmoy Dutta ◽

Atul Vir Singh ◽

Sonal Singhal ◽

Madhur Deo Upadhayay

Keyword(s):

Thin Film ◽

Acoustic Resonator ◽

Oxide Thin Film ◽

Zinc Oxide Thin Film ◽

Film Bulk Acoustic Resonator ◽

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A thin-film bulk acoustic resonator and filter with optimal edge shapes for mass production

Ultrasonics ◽

10.1016/j.ultras.2012.04.003 ◽

2013 ◽

Vol 53 (1) ◽

pp. 90-96 ◽

Author(s):

Motoaki Hara ◽

Masanori Ueda ◽

Yoshio Satoh

Keyword(s):

Thin Film ◽

Mass Production ◽

Acoustic Resonator ◽

Film Bulk Acoustic Resonator ◽

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Fabrication and RF characterization of zinc oxide based Film Bulk Acoustic Resonator

Superlattices and Microstructures ◽

10.1016/j.spmi.2018.04.001 ◽

2018 ◽

Vol 118 ◽

pp. 104-115 ◽

Author(s):

Raju Patel ◽

Deepak Bansal ◽

Vimal Kumar Agrawal ◽

Kamaljit Rangra ◽

Dharmendar Boolchandani

Keyword(s):

Acoustic Resonator ◽

Film Bulk Acoustic Resonator ◽

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Simulation study of electrode effect on thin film bulk acoustic resonator for viscosity sensor application

2017 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) ◽

10.1109/spawda.2017.8340349 ◽

2017 ◽

Author(s):

Hai-qiang Liu ◽

Jing-hui Dai ◽

Jin-hui Zhang ◽

Ling-feng Kong ◽

Li-feng Qin

Keyword(s):

Thin Film ◽

Simulation Study ◽

Acoustic Resonator ◽

Electrode Effect ◽

Sensor Application ◽

Film Bulk Acoustic Resonator ◽

Film Bulk ◽

Viscosity Sensor

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Finite element modelling of a thin‐film bulk acoustic resonator (FBAR)

COMPEL The International Journal for Computation and Mathematics in Electrical and Electronic Engineering ◽

10.1108/03321640810905774 ◽

2008 ◽

Vol 27 (6) ◽

pp. 1296-1306 ◽

Author(s):

Concettina Buccella ◽

Valerio De Santis ◽

Mauro Feliziani ◽

Piero Tognolatti

Keyword(s):

Thin Film ◽

Finite Element ◽

Finite Element Modelling ◽

Acoustic Resonator ◽

Element Modelling ◽

Film Bulk Acoustic Resonator ◽

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Highly sensitive detection of organophosphorus pesticides by acetylcholinesterase-coated thin film bulk acoustic resonator mass-loading sensor

Biosensors and Bioelectronics ◽

10.1016/j.bios.2012.08.018 ◽

2013 ◽

Vol 41 ◽

pp. 163-167 ◽

Author(s):

Da Chen ◽

Jingjing Wang ◽

Yan Xu ◽

Dehua Li ◽

Luyin Zhang ◽

...

Keyword(s):

Thin Film ◽

Organophosphorus Pesticides ◽

Acoustic Resonator ◽

Sensitive Detection ◽

Mass Loading ◽

Highly Sensitive ◽

Film Bulk Acoustic Resonator ◽

Film Bulk ◽

Highly Sensitive Detection

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AlN-based sputter-deposited shear mode thin film bulk acoustic resonator (FBAR) for biosensor applications — A review

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2010.08.109 ◽

2010 ◽

Vol 205 (5) ◽

pp. 1279-1286 ◽

Author(s):

G. Wingqvist

Keyword(s):

Thin Film ◽

Acoustic Resonator ◽

Film Bulk Acoustic Resonator ◽

Film Bulk ◽

Sputter Deposited ◽

Biosensor Applications

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