Novel phase-change material GeSbSe for application of three-level phase-change random access memory

2010 ◽  
Vol 54 (4) ◽  
pp. 443-446 ◽  
Author(s):  
Yifeng Gu ◽  
Zhitang Song ◽  
Ting Zhang ◽  
Bo Liu ◽  
Songlin Feng
2007 ◽  
Vol 16 (8) ◽  
pp. 2475-2478 ◽  
Author(s):  
Zhang Ting ◽  
Song Zhi-Tang ◽  
Liu Bo ◽  
Liu Wei-Li ◽  
Feng Song-Lin ◽  
...  

2011 ◽  
Vol 58 (12) ◽  
pp. 4423-4426 ◽  
Author(s):  
Liangcai Wu ◽  
Xilin Zhou ◽  
Zhitang Song ◽  
Min Zhu ◽  
Yan Cheng ◽  
...  

2011 ◽  
Vol 65 (7) ◽  
pp. 622-625 ◽  
Author(s):  
Yifeng Gu ◽  
Yan Cheng ◽  
Sannian Song ◽  
Ting Zhang ◽  
Zhitang Song ◽  
...  

2012 ◽  
Vol 112 (8) ◽  
pp. 084506 ◽  
Author(s):  
J. L. M. Oosthoek ◽  
D. Krebs ◽  
M. Salinga ◽  
D. J. Gravesteijn ◽  
G. A. M. Hurkx ◽  
...  

2013 ◽  
Vol 102 (10) ◽  
pp. 103110 ◽  
Author(s):  
Yifeng Gu ◽  
Sannian Song ◽  
Zhitang Song ◽  
Suyuan Bai ◽  
Yan Cheng ◽  
...  

MRS Advances ◽  
2016 ◽  
Vol 1 (39) ◽  
pp. 2731-2736 ◽  
Author(s):  
S. Shindo ◽  
Y. Sutou ◽  
J. Koike ◽  
Y. Saito ◽  
Y.-H. Song

ABSTRACTThe contact resistivity, ρc, between phase change material (PCM) and an electrode plays an important role in the operation of highly scaled phase change random access memory (PCRAM). We investigated the effect of surface cleaning on the ρc between a W electrode and amorphous GeCu2Te3 (GCT) which shows high thermal stability. The surface cleaning of the amorphous GCT was conducted by Ar reverse sputtering. The ρc of the amorphous GCT whose surface was cleaned with Ar reverse sputtering was 6.7×10-3Ω cm2. Meanwhile, the ρc of the amorphous GCT with no surface cleaning was 8.0×10-5Ω cm2. The low ρc in the amorphous GCT with no surface cleaning was apparently due to the existence of a low resistance Cu-rich underlayer which was formed as a consequence of surface oxidation of the amorphous GCT. These results indicate that the surface of a PCM must be treated carefully to accurately measure the contact resistivity between the PCM and electrodes.


Sign in / Sign up

Export Citation Format

Share Document