Diagnostics of the radio frequency magnetron discharge plasma used for TiO2 thin film sputtering deposition

2004 ◽  
Vol 187 (2-3) ◽  
pp. 358-363 ◽  
Author(s):  
Lucel Sirghi ◽  
Toru Aoki ◽  
Yoshinori Hatanaka
Keyword(s):  
Thin Film ◽  
Radio Frequency ◽  
Tio2 Thin Film ◽  
Discharge Plasma ◽  
Radio Frequency Magnetron ◽  
Magnetron Discharge ◽  
Sputtering Deposition

Wafer-Scale Growth of ITO Nanorods by Radio Frequency Magnetron Sputtering Deposition

2011 ◽  
Vol 158 (5) ◽  
pp. K131 ◽  
Author(s):  
Jae Hyoung Park ◽  
Hoo Keun Park ◽  
Jinhoo Jeong ◽  
Woong Kim ◽  
Byoung Koun Min ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Scale Growth ◽  
Sputtering Deposition ◽  
Wafer Scale

Fabrication and characterizations of ZnO thin film transistors prepared by using radio frequency magnetron sputtering

2008 ◽  
Vol 52 (5) ◽  
pp. 813-816 ◽  
Author(s):  
R. Navamathavan ◽  
Chi Kyu Choi ◽  
Eun-Jeong Yang ◽  
Jae-Hong Lim ◽  
Dae-Kue Hwang ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Thin Film Transistors ◽  
Radio Frequency Magnetron ◽  
Zno Thin Film ◽  
Radio Frequency Magnetron Sputtering

Radio frequency magnetron sputtered epitaxial Cu2 ZnSnS4 thin film on ZnS(100)

2014 ◽  
Vol 8 (5) ◽  
pp. 404-407 ◽  
Author(s):  
Ning Song ◽  
Wei Li ◽  
Xiaojing Hao ◽  
Yidan Huang ◽  
Martin A. Green
Keyword(s):  
Thin Film ◽  
Radio Frequency ◽  
Radio Frequency Magnetron

ZnO thin film synthesis by reactive radio frequency magnetron sputtering

2014 ◽  
Vol 318 ◽  
pp. 2-5 ◽  
Author(s):  
Volkan Şenay ◽  
Suat Pat ◽  
Şadan Korkmaz ◽  
Tuna Aydoğmuş ◽  
Saliha Elmas ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Zno Thin Film ◽  
Radio Frequency Magnetron Sputtering ◽  
Film Synthesis
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