Low-temperature LPCVD of Si nanocrystals from disilane and trisilane (Silcore®) embedded in ALD-alumina for non-volatile memory devices
2007 ◽
Vol 201
(22-23)
◽
pp. 9209-9214
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Keyword(s):
2008 ◽
Vol 85
(12)
◽
pp. 2442-2444
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Keyword(s):
2013 ◽
Vol 210
(8)
◽
pp. 1505-1511
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2016 ◽
Vol 213
(9)
◽
pp. 2446-2451
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Keyword(s):
2016 ◽
Vol 4
(46)
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pp. 10967-10972
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2006 ◽
pp. 103-129