The deposition of crystallized TiO2 coatings by closed field unbalanced magnetron sputter ion plating

2013 ◽  
Vol 236 ◽  
pp. 290-295 ◽  
Author(s):  
X. Zhang ◽  
K. Cooke ◽  
P. Carmichael ◽  
I.P. Parkin
Keyword(s):  
Closed Field ◽  
Ion Plating ◽  
Unbalanced Magnetron ◽  
Magnetron Sputter ◽  
Tio2 Coatings

Synthesis and Characterization of CrXN Nano-Multilayer Coatings

2008 ◽  
Vol 373-374 ◽  
pp. 126-129
Author(s):  
H.Q. Li ◽  
X.Y. Li ◽  
Hai Lin Sun ◽  
Dennis Teer ◽  
Han Shan Dong
Keyword(s):  
Synthesis And Characterization ◽  
Multilayer Coatings ◽  
Closed Field ◽  
Wear Properties ◽  
Ion Plating ◽  
Unbalanced Magnetron ◽  
Magnetron Sputter ◽  
Crn Coatings ◽  
Wear Tests

Three types of nano-multilayer coatings, CrSiN, CrAlN and CrMoN, with different Si, Al and Mo contents were deposited on M42 substrates using a closed field unbalanced magnetron sputter ion plating (CFUMSIP) technique. Systematic characterization on the chemical composition, microstructure, hardness and wear properties of these multilayer coatings has been investigated using GDOES, low angle XRD, SEM, TEM, nanoindentation and wear tests. Experimental results revealed that all these three types of Cr, XN ternary coatings (X=Al, Si and Mo) are nano-multilayer structured. The CrAlN multilayer coatings showed the highest hardness and oxidation resistance among these three multilayer coatings. The CrMoN multilayer coatings exhibited the lowest friction coefficient although no appreciable improvements in wear resistance were observed as compared with the optimized CrN coatings.

scholarly journals Surface Free Energy of Alloy Nitride Coatings Deposited Using Closed Field Unbalanced Magnetron Sputter Ion Plating

2006 ◽  
Vol 47 (10) ◽  
pp. 2533-2539 ◽  
Author(s):  
Chen-Cheng Sun ◽  
Shih-Chin Lee ◽  
Wen-Chi Hwang ◽  
Jenn-Shyong Hwang ◽  
I-Tseng Tang ◽  
...  
Keyword(s):  
Free Energy ◽  
Surface Free Energy ◽  
Closed Field ◽  
Ion Plating ◽  
Unbalanced Magnetron ◽  
Nitride Coatings ◽  
Magnetron Sputter

Multilayer nitride coatings by closed field unbalanced magnetron sputter ion plating

2003 ◽  
Vol 162 (2-3) ◽  
pp. 276-287 ◽  
Author(s):  
K.E. Cooke ◽  
M. Bamber ◽  
J. Bassas ◽  
D. Boscarino ◽  
B. Derby ◽  
...  
Keyword(s):  
Closed Field ◽  
Ion Plating ◽  
Unbalanced Magnetron ◽  
Nitride Coatings ◽  
Magnetron Sputter
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