Modification of graphene-like, hydrogenated amorphous, hydrogenated tetrahedral amorphous carbon and amorphous carbon thin films by UV-C light

2021 ◽  
Vol 24 ◽  
pp. 101073
Author(s):  
T.I. Milenov ◽  
I.A. Avramova ◽  
A. Dikovska ◽  
D. Karaivanova ◽  
P. Terziyska ◽  
...  
Keyword(s):  
Thin Films ◽  
Amorphous Carbon ◽  
Tetrahedral Amorphous Carbon ◽  
Carbon Thin Films ◽  
Hydrogenated Amorphous ◽  
Uv C

scholarly journals Hydrogenated amorphous carbon thin films deposition by pulsed DC plasma enhanced by electrostatic confinement

2014 ◽  
Vol 258 ◽  
pp. 219-224 ◽  
Author(s):  
S.M.M. Dufrène ◽  
F. Cemin ◽  
M.R.F. Soares ◽  
C. Aguzzoli ◽  
M.E.H. Maia da Costa ◽  
...  
Keyword(s):  
Thin Films ◽  
Amorphous Carbon ◽  
Dc Plasma ◽  
Hydrogenated Amorphous Carbon ◽  
Pulsed Dc ◽  
Electrostatic Confinement ◽  
Carbon Thin Films ◽  
Hydrogenated Amorphous

Tetrahedral amorphous-carbon thin films for silicon-on-insulator application

2002 ◽  
Vol 80 (5) ◽  
pp. 743-745 ◽  
Author(s):  
Z. R. Song ◽  
Y. H. Yu ◽  
C. L. Li ◽  
S. C. Zou ◽  
F. M. Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Amorphous Carbon ◽  
Silicon On Insulator ◽  
Tetrahedral Amorphous Carbon ◽  
Carbon Thin Films
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