Effect of misalignment on the dynamic characteristic of MEMS gas bearing considering rarefaction effect

2019 ◽  
Vol 139 ◽  
pp. 22-35 ◽  
Author(s):  
Liangliang Li ◽  
Di Zhang ◽  
Yonghui Xie
2020 ◽  
Vol ahead-of-print (ahead-of-print) ◽  
Author(s):  
Liangliang Li ◽  
Yonghui Xie

Purpose Owing to the development of the smaller-sized rotational machinery, the demand for the high-speed and low-resistance gas bearing increases rapidly. The research of micro gas bearing in the condition of rarefied gas state is still not satisfied. Therefore, the purpose of this paper is to present a numerical investigation of the effect of misalignment and rarefaction effect on the comprehensive performance of micro-electrical-mechanical system (MEMS) gas bearing. Design/methodology/approach The Fukui and Kaneko model is expanded to 2D solution domain to describe the flow field parameters. The finite element method is used to discretize the equation. Newton–Raphson method is used to solve the nonlinear equations for the static performance of gas bearing, and partial deviation method is adopted for the solution of dynamic equations. Findings The static and dynamic characteristics of MEMS gas bearing are calculated, and the comparison is made to study the influence of rarefaction effect and misalignment. The results show that the rarefaction effect will decrease bearing load capacity compared with traditional solution of Reynolds equation, and the misalignment will reduce the stability of bearing. The influence of misalignment on gas film thickness is also analyzed in this paper. Originality/value The investigation of this paper emerges the change regularity of comprehensive performance of MEMS gas bearing considering rarefaction effect and misalignment, which provides a reference for the actual manufacturing of MEMS gas bearing and for the safety operation of micro dynamic machinery. Peer review The peer review history for this article is available at: https://publons.com/publon/10.1108/ILT-01-2020-0023/


Author(s):  
Chenhui Jia ◽  
Zhiwu Cui ◽  
Shijun Guo ◽  
Wensuo Ma

A realizable k–ε turbulence model for spherical spiral groove hybrid gas bearing films was established based on computational fluid dynamics (CFD). A six degrees of freedom passive grid was used to calculate the gas film pressure distribution, bearing capacity, and dynamic characteristic coefficients numerically. The gas flow field dynamic and static pressure coupling mechanism was studied. The effects of the rotation speed, gas film thickness eccentricity ratio, and gas supply pressure on the dynamic and static pressure bearing capacity, and dynamic characteristic coefficients during operation were analyzed as a method of research into the mechanical mechanisms of gas bearing stability. The CFD calculation analysis can simulate the complex gas flow in the transient flow field of the gas film and determine reasonable operation parameters to optimize the dynamic and static pressure coupling effects, which can improve the gas film bearing capacity, dynamic characteristics, and operational stability of gas bearings.


2012 ◽  
Vol 134 (2) ◽  
Author(s):  
Wen-Ming Zhang ◽  
Guang Meng ◽  
Zhi-Ke Peng ◽  
Di Chen

A mathematical model of gaseous slip flow in ultra-thin film gas bearings is numerically analyzed incorporating effects of surface roughness, which is characterized by fractal geometry. The Weierstrass-Mandelbrot (W-M) function is presented to represent the multiscale self-affine roughness of the surface. A modified Reynolds equation incorporating velocity slip boundary condition is applied for the arbitrary range of Knudsen numbers in the slip and transition regimes. The effects of bearing number, Knudsen number, geometry parameters of the bearing and roughness parameters on the complex flow behaviors of the gas bearing are investigated and discussed. Numerical solutions are obtained for various bearing configurations under the coupled effects of rarefaction and roughness. The results indicate that roughness has a more significant effect on higher Knudsen number (rarefaction effect) flows with higher relative roughness. Surface with larger fractal dimensions yield more frequency variations in the surface profile, which result in an obviously larger incremental pressure loss. The Poiseuille number increases not only with increasing of rarefaction effect but also with increasing the surface roughness. It can also be observed that the current study is in good agreement with solutions obtained from the linearized Boltzmann equation.


2020 ◽  
Vol 64 (1-4) ◽  
pp. 1337-1345
Author(s):  
Chuan Zhao ◽  
Feng Sun ◽  
Junjie Jin ◽  
Mingwei Bo ◽  
Fangchao Xu ◽  
...  

This paper proposes a computation method using the equivalent magnetic circuit to analyze the driving force for the non-contact permanent magnet linear drive system. In this device, the magnetic driving force is related to the rotation angle of driving wheels. The relationship is verified by finite element analysis and measuring experiments. The result of finite element simulation is in good agreement with the model established by the equivalent magnetic circuit. Then experiments of displacement control are carried out to test the dynamic characteristic of this system. The controller of the system adopts the combination control of displacement and angle. The results indicate that the system has good performance in steady-state error and response speed, while the maximum overshoot needs to be reduced.


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