GROWTH CHARACTERIZATION OF a Si:H FILMS BY MULTIPLE ANGLE OF INCIDENCE SPECTROSCOPIC ELLIPSOMETRY

1983 ◽  
Vol 44 (C10) ◽  
pp. C10-247-C10-251
Author(s):  
J. Perrin ◽  
B. Drevillon
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Angle Of Incidence ◽  
Growth Characterization

Analysis for the Characterization of Oxygen Implanted Silicon (SIMOX) by Spectroscopic Ellipsometry

1990 ◽  
Vol 209 ◽  
Author(s):  
M.G. Doss ◽  
D. Chandler-Horowitz ◽  
J. F. Marchiando ◽  
S. Krause ◽  
S. Seraphin
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Spectroscopic Ellipsometry ◽  
Angle Of Incidence ◽  
High Current ◽  
Layer Model ◽  
Unusual Structure ◽  
Transmission Electron ◽  
Best Fit

ABSTRACTSamples of SIMOX have been prepared by implantation in a high-current implanter (density ≍ 1 mA/cm2) and by annealing at 1300°C for 6 hours. Transmission electron microscopy reveals unusual structure in these samples. Spectroscopic ellipsometry has been used to analyze these structures. Ellipsometric measurements were collected at an angle of incidence of 75. deg, with photon energies from 1.5 to 5.0 eV, and using a rotating polarizer configuration. The measurements were analyzed with three models: a three-layer model, a four-layer model, and a five-layer model. The five-layer model provided the best fit of the three. This model identified a layer of crystalline Si inclusions (“islands”) within the SiO2 layer. A method is presented that provides initial estimates for the thicknesses of the top three layers to help start the regression analysis.

Optical Characterization of 4H-SiC by Variable Angle of Incidence Spectroscopic Ellipsometry

2000 ◽  
Vol 338-342 ◽  
pp. 575-578 ◽  
Author(s):  
O.P. Alexander Lindquist ◽  
H. Arwin ◽  
Urban Forsberg ◽  
Peder Bergman ◽  
K. Järrendahl
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Optical Characterization ◽  
Angle Of Incidence ◽  
Variable Angle

Optical characterization of hybrid PEDOT:PSS/Si heterostructures by spectroscopic ellipsometry

2021 ◽  
Vol 717 (1) ◽  
pp. 92-97
Author(s):  
O. S. Kondratenko ◽  
S. V. Mamykin ◽  
T. S. Lunko ◽  
I. B. Mamontova ◽  
V. R. Romanyuk
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Optical Characterization

scholarly journals Growth characterization of CHO DP-12 cell lines with different high passage histories

2011 ◽  
Vol 5 (S8) ◽  
Author(s):  
Christoph Heinrich ◽  
Timo Wolf ◽  
Christina Kropp ◽  
Stefan Northoff ◽  
Thomas Noll
Keyword(s):  
Cell Lines ◽  
High Passage ◽  
Growth Characterization

scholarly journals Characterization of μc-Si:H/a-Si:H tandem solar cell structures by spectroscopic ellipsometry

2014 ◽  
Vol 571 ◽  
pp. 756-761 ◽  
Author(s):  
Daisuke Murata ◽  
Tetsuya Yuguchi ◽  
Hiroyuki Fujiwara
Keyword(s):  
Solar Cell ◽  
Spectroscopic Ellipsometry ◽  
Tandem Solar Cell ◽  
Cell Structures
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