Epitaxial growth of TiO2 thin films on SrTiO3, LaAlO3 and yttria-stabilized zirconia substrates by electron beam evaporation

2007 ◽  
Vol 515 (7-8) ◽  
pp. 3439-3447 ◽  
Author(s):  
A. Lotnyk ◽  
S. Senz ◽  
D. Hesse
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Epitaxial Growth ◽  
Electron Beam Evaporation ◽  
Yttria Stabilized Zirconia ◽  
Stabilized Zirconia ◽  
Tio2 Thin Films

Oblique angle deposition of TiO2 thin films prepared by electron-beam evaporation

2010 ◽  
Vol 257 (4) ◽  
pp. 1149-1153 ◽  
Author(s):  
Min Wook Pyun ◽  
Eui Jung Kim ◽  
Dae-Hwang Yoo ◽  
Sung Hong Hahn
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Electron Beam Evaporation ◽  
Oblique Angle Deposition ◽  
Oblique Angle ◽  
Tio2 Thin Films ◽  
Angle Deposition

Oxide ion conduction of yttria-stabilized zirconia films deposited by atomic layer deposition

2008 ◽  
Vol 1098 ◽  
Author(s):  
Cheng-Chieh Chao ◽  
Hong Huang ◽  
Joon Seok Park ◽  
Fritz B. Prinz
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Electron Beam Evaporation ◽  
Yttria Stabilized Zirconia ◽  
Ohmic Loss ◽  
Stabilized Zirconia ◽  
Oxide Ion Conductivity ◽  
Layer Deposition ◽  
Oxide Ion

AbstractYttria-stabilized zirconia (YSZ) is one of the most common electrolytes in high temperature solid oxide fuel cell (SOFCs). We utilize atomic layer deposition (ALD) to fabricate the electrolyte of SOFC, which may potentially improve several fundamental characteristics of SOFC. Recently, our group demonstrated that ultra-thin ALD YSZ SOFSs can deliver high power density at low temperatures [1]. These SOFCs demonstrated not only reduction of Ohmic loss, but also enhancement of surface kinetics.The focus of this work is to investigate the surface and bulk conduction characteristics of YSZ films produced by ALD. In plane conductivity was measured as a function of film thickness and temperature dependence. YSZ thin films were deposited on standard 4 ” quartz substrates with thicknesses ranging from 8 nanometers to 55 nanometers. Micro-electrodes were patterned on top of the ALD YSZ layer by standard photolithography process. The impedances of the YSZ thin films with different thicknesses were measured. We have observed higher conductivities for thinner films which were attributed to higher oxide ion conductivity in the vicinity of the surface, and similar phenomenon was observed with YSZ films produced by electron beam evaporation [2].

A spectroscopic ellipsometry study of TiO2 thin films prepared by ion-assisted electron-beam evaporation

2009 ◽  
Vol 9 (3) ◽  
pp. 707-712 ◽  
Author(s):  
Pitak Eiamchai ◽  
Pongpan Chindaudom ◽  
Artorn Pokaipisit ◽  
Pichet Limsuwan
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Spectroscopic Ellipsometry ◽  
Electron Beam Evaporation ◽  
Tio2 Thin Films
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