Influence of substrate type on surface structure of polymeric perfluorocarbon in the initial stage of deposition in Ar/c-C4F8 plasmas
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2008 ◽
Vol 96
(12)
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pp. 632-643
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1998 ◽
Vol 72
(2)
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pp. 112-118
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2015 ◽
Vol 28
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pp. 065005
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2015 ◽
Vol 22
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pp. 16202-16209
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