Selective epitaxial silicon growth in high aspect ratio contact on 70 nm node flash memory

Thin Solid Films ◽

10.1016/j.tsf.2009.05.048 ◽

2009 ◽

Vol 517 (24) ◽

pp. 6850-6852 ◽

Author(s):

Ching-Yuan Ho ◽

Jr-Hau He ◽

Yuan-Pul Chang ◽

Chenhsin Lien

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Flash Memory ◽

Epitaxial Silicon ◽

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Impact of High-Aspect-Ratio Etching Damage on Selective Epitaxial Silicon Growth in 3D NAND Flash Memory

10.1109/eurosoi-ulis53016.2021.9560693 ◽

2021 ◽

Author(s):

Tobias Reiter ◽

Xaver Klemenschits ◽

Lado Filipovic

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Flash Memory ◽

Epitaxial Silicon ◽

Nand Flash Memory ◽

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Optimization of Tilted Profile in Ultra-High Aspect Ratio Etch Process for 3D NAND Flash Memory

2021 5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) ◽

10.1109/edtm50988.2021.9420902 ◽

2021 ◽

Author(s):

Jinqing He ◽

Zhiliang Xia ◽

Meng Wang ◽

Guangxuan Zhang ◽

Haiqing Dou ◽

...

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Flash Memory ◽

Nand Flash Memory

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Investigation of Reducing Bow during High Aspect Ratio Trench Etching in 3D NAND Flash Memory

2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) ◽

10.1109/icsict.2018.8564971 ◽

2018 ◽

Author(s):

Yuan Ye ◽

Zhi-Liang Xia ◽

Li-Peng Liu ◽

Zong-Liang Huo

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Flash Memory ◽

Nand Flash Memory

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Investigation on High Aspect Ratio Multi-level Contact Holes Etching Process in Three-Dimensional Flash Memory Manufacturing

2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) ◽

10.1109/icsict.2018.8564989 ◽

2018 ◽

Author(s):

Yu-qi Wang ◽

Li-peng Liu ◽

Bao-you Chen ◽

Wen-jie Zhang ◽

Chuan-bin Zeng

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Flash Memory ◽

Three Dimensional ◽

Etching Process ◽

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FORMATION OF THICK HIGH-ASPECT-RATIO RESISTIVE MASKS BY THE CONTACT PHOTOLITHOGRAPHY METHOD

Автометрия ◽

10.15372/aut20180202 ◽

2018 ◽

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio

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Low and heat transfer in a high-aspect-ratio rib-roughed cooling channel with longitudinal intersecting ribs

Прикладная механика и техническая физика ◽

10.15372/pmtf20180414 ◽

2018 ◽

Keyword(s):

Heat Transfer ◽

Aspect Ratio ◽

High Aspect Ratio ◽

Cooling Channel

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HEAT TRANSFER IN A FLAT CHANNEL WITH HIGH ASPECT RATIO AT A HEAT CARRIER FLOW WITH LOW-PRANDTL NUMBER

10.1615/ihtc16.cov.022710 ◽

2018 ◽

Author(s):

Viktor S. Naumkin ◽

O.V. Vitovsky ◽

Maksim S. Makarov ◽

V. E. Nakoryakov

Keyword(s):

Heat Transfer ◽

Aspect Ratio ◽

Prandtl Number ◽

Heat Carrier ◽

High Aspect Ratio ◽

Flat Channel ◽

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MODELING OF EPITAXIAL SILICON GROWTH IN A PLANETARY CVD REACTOR

10.1615/ihtc16.cms.023782 ◽

2018 ◽

Author(s):

Zaher Ramadan ◽

Ik-Tae Im

Keyword(s):

Epitaxial Silicon ◽

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HEAT TRANSFER AND PRESSURE LOSS PERFORMANCE FOR FAMILIES OF PARTIAL LENGTH PIN FIN ARRAYS IN HIGH ASPECT RATIO RECTANGULAR DUCTS

Proceeding of International Heat Transfer Conference 8 ◽

10.1615/ihtc8.1470 ◽

1986 ◽

Author(s):

G. D. Steuber ◽

D. E. Metzger

Keyword(s):

Heat Transfer ◽

Aspect Ratio ◽

High Aspect Ratio ◽

Pressure Loss ◽

Pin Fin ◽

Partial Length ◽

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High quality and high aspect ratio processing of multilayer structures with dissimilar material properties by UV laser microjet

International Congress on Applications of Lasers & Electro-Optics ◽

10.2351/1.5118615 ◽

2016 ◽

Author(s):

Jérémie Diboine ◽

Pierre Leroux ◽

Helgi Diehl ◽

Bernold Richerzhagen

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Material Properties ◽

Dissimilar Material ◽

Multilayer Structures ◽

Uv Laser ◽

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