Comparison of chromium nitride coatings deposited by DC and RF magnetron sputtering

2011 ◽  
Vol 519 (7) ◽  
pp. 2116-2120 ◽  
Author(s):  
Shuyong Tan ◽  
Xuhai Zhang ◽  
Xiangjun Wu ◽  
Feng Fang ◽  
Jianqing Jiang
Keyword(s):  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Chromium Nitride ◽  
Nitride Coatings

scholarly journals Effect of Bias Voltage on Microstructure and Properties of Tantalum Nitride Coatings Deposited by RF Magnetron Sputtering

Coatings ◽  
2021 ◽  
Vol 11 (8) ◽  
pp. 911
Author(s):  
Wei Dai ◽  
Yunzhan Shi
Keyword(s):  
Magnetron Sputtering ◽  
Bias Voltage ◽  
Rf Magnetron Sputtering ◽  
Amorphous Structure ◽  
Tribological Performance ◽  
Tantalum Nitride ◽  
Growth Morphology ◽  
Low Friction ◽  
Nitride Coatings ◽  
Overall Performance

TaNx coatings were deposited by RF magnetron sputtering with different bias voltages. The growth morphology, crystalline structure, chemical bond structure, hardness and elastic modulus, adhesion strength and tribological performance of the coatings were studied as a function of the bias voltage. The results showed that an increasing bias voltage refines the coating grains and facilitates structure densification. Simultaneously, the structure of the TaNx coatings transfers from a composite structure consisting of TaN and Ta2N crystals, through a single composite mainly composed of the Ta2N crystal, to an amorphous structure as the bias voltage increases from low to high, indicating that the phase composition of the TaNx coatings can be varied by the bias voltage. The coating composed of Ta2N crystal showed a good overall performance including enhanced hardness, enhanced adhesive strength, and good tribological performance with enhanced wear resistance and a low friction coefficient of 0.18.

scholarly journals 507 Fabrication of Chromium nitride Coatings with High Wear and Corrosion Resistance by Magnetron sputtering

2006 ◽  
Vol 2006.43 (0) ◽  
pp. 145-146
Author(s):  
Yoshihiko KUBOTA ◽  
Jyunsuke KIUCHI ◽  
Hiroyuki MAGARA ◽  
Eiji SAJI ◽  
Shigeki YOSHINAGA ◽  
...  
Keyword(s):  
Corrosion Resistance ◽  
Magnetron Sputtering ◽  
Chromium Nitride ◽  
Wear And Corrosion ◽  
Nitride Coatings ◽  
Wear And Corrosion Resistance

The structure and properties of chromium nitride coatings deposited using dc, pulsed dc and modulated pulse power magnetron sputtering

2010 ◽  
Vol 204 (14) ◽  
pp. 2230-2239 ◽  
Author(s):  
Jianliang Lin ◽  
John J. Moore ◽  
William D. Sproul ◽  
Brajendra Mishra ◽  
Zhili Wu ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Pulse Power ◽  
Chromium Nitride ◽  
Structure And Properties ◽  
Pulsed Dc ◽  
Nitride Coatings

Comparative study of chromium nitride coatings deposited by unbalanced and balanced magnetron sputtering

2005 ◽  
Vol 474 (1-2) ◽  
pp. 119-126 ◽  
Author(s):  
J.J. Olaya ◽  
S.E. Rodil ◽  
S. Muhl ◽  
E. Sánchez
Keyword(s):  
Magnetron Sputtering ◽  
Comparative Study ◽  
Chromium Nitride ◽  
Nitride Coatings

Deposition and characterization of titanium aluminum nitride coatings prepared by RF magnetron sputtering

2015 ◽  
Vol 350 ◽  
pp. 6-9 ◽  
Author(s):  
Amina Zouina Ait-Djafer ◽  
Nadia Saoula ◽  
Hamid Aknouche ◽  
Bendiba Guedouar ◽  
Noureddine Madaoui
Keyword(s):  
Aluminum Nitride ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Titanium Aluminum ◽  
Nitride Coatings ◽  
Titanium Aluminum Nitride
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