Pulsed-radio frequency plasma enhanced chemical vapour deposition of low temperature silicon nitride for thin film transistors

2012 ◽  
Vol 520 (15) ◽  
pp. 4831-4834 ◽  
Author(s):  
Arman Ahnood ◽  
Yuji Suzuki ◽  
Arun Madan ◽  
Arokia Nathan
Keyword(s):  
Thin Film ◽  
Silicon Nitride ◽  
Low Temperature ◽  
Radio Frequency ◽  
Chemical Vapour Deposition ◽  
Thin Film Transistors ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Radio Frequency Plasma ◽  
Frequency Plasma

Effect of pre-deposited carbon layer on the formation of carbon nitride nanostructures prepared by radio-frequency plasma enhanced chemical vapour deposition

2011 ◽  
Vol 130 (1-2) ◽  
pp. 218-222 ◽  
Author(s):  
Noor Hamizah Khanis ◽  
Richard Ritikos ◽  
Maisara Othman ◽  
Nur Maisarah Abdul Rashid ◽  
Siti Meriam Ab Gani ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Chemical Vapour Deposition ◽  
Carbon Nitride ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Carbon Layer ◽  
Radio Frequency Plasma ◽  
Frequency Plasma
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